4: Data Files – Measurement / Validation
41
4.1 Data File Overview –
Measurement / Validation
Data files are created and stored on the user interface for each measurement test. They contain the
data that was collected during the test. The file naming format is as follows:
Measurement Data File
TTTTTT_MMM_DD_YYYY_hhmm [am/pm]_XXXXXXXX.txt
Where,
TTTTTT = operator entered test name designation (
10 characters max
)
MMM = month
DD = day
YYYY = year (i.e. 2018)
hh = hour
mm = minute
am/pm = If 12H selected for ‘Time Format’
XXXXXXXXXX = heater tube serial number entered in test configuration
Validation Data File
VALR_MMM_DD_YYYY_hhmm [am/pm].txt
Where,
VALR = fixed Validation test name
MMM = month
DD = day
YYYY = year (i.e. 2018)
hh = hour
mm = minute
am/pm = If 12H selected for ‘Time Format’
Data files can be copied from the machine to an external device using the ‘File Browser’, as discussed
in Section 3.5.3. The data files are saved in a format that can be opened within a standard
spreadsheet or document application once transferred to an external PC. The data files are saved as
a .txt formatted file.
The (
measurement/validation
) data file consists of header information and stored data records (
data
table
). The measurement data table is captured and stored based on the configured test parameters
(
slices and position
) for the duration of the test. The measurement data table is made up of five (5)
parts: non-normalized data, 2x3 normalized data, 3x2 normalized data, 6x1 normalized data and
ellipsometric angles. The validation data table is made up of three (3) parts: Angle [deg], Power
Wafer 1, Power Wafer 2.