3: Detailed User Interface Features
36
3.5.6
Settings Display
When enabled, selection of this display button allows the operator to change measurement
settings.
Note: This display is for factory technicians and authorized service personnel use only.
Figure 3-10 – Settings Display
In the Settings Display (figure 3-10) you can change parameters for use in the Measurement
test as well as others parts of the Falex 430 ETR.
Lab Information
– Lab Name, City, State & Country can be modified. The Ellipsometer SN
cannot be modified. The keyboard icon will open up a full size keyboard for use in modifying
these fields.
Change Service Mode Password
– To modify the Service Mode Password you have to type in
the current password
(
default is ETR
)
. In the next text fields you have to type in the new
password. If the current password is correct you can click the ‘Save New Password’ button
Ellipsometer Parameters
– These parameters can be modified to change the Ellipsometer
Properties. These parameters describe the optical properties of the heater tube (ns, nf) and
the deposit film (ks, kf) [
default properties is for aluminum ns, nf, ks, kf
]. Once modified, the ‘Save’
button stores the new parameters to be used for the next Measurement test(s).
Note: Incorrect optical properties will result in unreliable measurement results, modify these
parameters with caution.
FPGA Status
- Shows the actual status of the built-in FPGA firmware and the current version.