Procedure
1. Close the process gas inlet two-way valve (D), outlet valve (C), purge valve (F), and drain valves (M).
2. Set the process/calibration selector valve (B) to the Process Gas position.
3. Open the process gas inlet two-way valve (D).
4. Open the outlet valve (C).
5. Set the pressure regulator (G) to the working pressure of the system without exceeding 122 psia
(8.41 bara).
6. Open the chamber filling valve (E).
7. Allow gas to flow for three minutes.
8. Close the outlet valve (C).
9. Observe the reference chamber pressure gauge (Q) until it reaches the desired pressure:
a) Close the process gas inlet two-way valve (D) and open the purge valve (F), allowing the gas to
vent to atmospheric pressure.
10. Purge-cycle the device.
a) Close the purge valve (F) and open the process gas inlet two-way valve (D).
b) Observe the reference chamber pressure indicator (Q) until it reaches the desired control
pressure, close the process gas inlet two-way valve (D) and open the purge valve (F).
c) Allow the gas to vent to atmospheric pressure.
d) Repeat this step for the required number of cycles, as determined by the following equation:
NumberPurgeCycles =
21
MaxRegulatorPressure
11. Close the purge valve (F) and open the process gas inlet two-way valve (D).
12. When the reference chamber pressure reaches the desired value, close the chamber filling valve (E) and
the process gas inlet valve (D) in preparation for flowing the calibration gases.
The reference chamber is now filled with the reference gas at the control pressure, and the SGM is ready to
run the calibration gases.
Important
After the reference chamber has been filled, do not open the chamber filling valve (N) again.
Related information
5.4 Calibrate the SGM device
The SGM device must be calibrated for your process gas. The SGM leaves the factory uncalibrated and
requires proper field calibration to generate calibration coefficients for your process gas.
Prerequisites
•
You must have completed the purge procedure, and the reference chamber must be filled with the
reference gas to the appropriate pressure.
Configuration and Use Manual
Purging and calibration
MMI-20020954
March 2021
Configuration and Use Manual
33