b) Set the pressure regulator on the lower calibration gas to the appropriate sample pressure for
your installation.
c) Set the calibration gas selector valve (A) to the calibration gas 2 inlet (I) position. The process
gas inlet valve (D) must remain closed.
d) Choose
Start Calibration
and choose the calibration gas you are using, then select
OK
.
e) As the gas flows, select the
Start
button and observe the
Sensor Time Period
and
Stability
values.
f) Wait between 3 to 15 minutes for the system to stabilize. When
Calibration Point
is
Good
, select
OK
.
If measurement does not stabilize after 30 minutes, select
Abort
and troubleshoot the problem.
g) Disconnect the calibration gas.
9. Choose
Results
to review the results for this calibration.
If you want to recalculate one or more of the calibration points, select
Back
and repeat the step.
10. Optional: To add a calibration, return to the first step and repeat this procedure.
Restriction
The additional calibrations must use the same measurement type and calibration type.
11. Choose
Configure
→
Manual Setup
→
Measurements
→
Gas Calibration
and set
Active Calibration
to the calibration to be used for measurement.
For 2-point calibrations, two calibration coefficients (K0 and K2) are calculated and used in measurement.
Postrequisites
To restore normal gas flow, set the process/calibration gas selector valve (B) to the process gas position and
open the process gas inlet valve (D).
Related information
Functional view of the SGM
Verify the SGM calibration
5.4.4 Verify the SGM calibration
If one of the calibration point measurements does not stabilize within 30 minutes, abort the calibration and
check for problems.
Typical problems include the following:
•
The calibration gas is not flowing. Ensure that the pressure of the calibration gas is 15% to 25% higher than
the reference chamber pressure, then check for obstructions in the gas path.
•
The reference chamber or the gas path is leaking. Check for leakage.
•
Verify that the purge valve and pipework connections are correct.
Depending on the problem, you may be able to restart the calibration at the abort point.
Configuration and Use Manual
Purging and calibration
MMI-20020954
March 2021
Configuration and Use Manual
43