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MT-64E-002-J

STP Series Turbomolecular Pumps

STP-iX455/iXL455 Series

Instruction Manual

Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.

Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.

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Summary of Contents for STP-iX455

Page 1: ... Instruction Manual Copyright 2016 Edwards Japan Limited All rights reserved Printed in Japan Read through the Safety Precautions and each section of this Manual carefully before using the STP pump Keep this Manual in a place where you can quickly access it at any time ...

Page 2: ...ission Class A EN61000 6 2 2005 Electromagnetic compatibility EMC Generic standards Immunity for industrial environments EN55011 2009 A1 2010 Industrial scientific and medical equipment Radio frequency disturbance characteristics Group1 Class A EN50581 2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances and f...

Page 3: ...ymbols are used in this manual Death or Serious Personal Injury Failure to follow the guidelines marked with this symbol may result in death or serious personal injury Minor Personal Injury Product and or Peripheral equipment Damage Failure to follow the guidelines marked with this symbol may result in minor personal injury product and or peripheral equipment damage NOTICE Items you must follow du...

Page 4: ...c corrosive etc And keep MSDS and a safety advice of gas supplier Warn of the danger of the gas with the warning label when the use gas is hazardous chemical material Always execute gas purge in the pump with the inert gas and then exhaust residual gases thoroughly from the STP pump when removing the STP pump from the vacuum equipment Secure safety by wearing personal protective equipment when usi...

Page 5: ...osphere might be introduced in the STP pump depending upon the backing pump Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates example shut the valve When atmosphere is introduced into the STP pump the touch down bearing may not operate normally Connect the cables securely NEVER bend nor place heavy objects on the cable Doing so...

Page 6: ...ump Model Name Specification STP iX455 Compact type Integrated control unit High vacuum type STP iX455C Compact type Integrated control unit Corrosion resistant type 1 STP iXL455 Compact type Integrated control unit Low vibration type High vacuum type STP iXL455C Compact type Integrated control unit Low vibration type High vacuum type Corrosion resistant type 1 In this manual the above STP iX455 i...

Page 7: ...se in all establishments other than domestic and those directly connected to a low voltage power supply network which supplies buildings used for domestic purposes This product may have potential difficulties in ensuring electromagnetic compatibility in other than industrial environments due to conducted as well as radiated disturbances This product must not be used in residential areas because it...

Page 8: ...arts which are not specified by Edwards 4 Maintenance personnel other than those authorized by Edwards or Service office have disassembled reconditioned or tampered the product 5 Defect resulting from the not specified use of the product 6 When the product is used under special conditions without obtaining the written consent of Edwards Particular gases strong magnetic field and the radiation are ...

Page 9: ...STP iX455 iXL455 Series Instruction Manual 7 4 SPARE PARTS Touch down bearing When exchanging the touch down bearing contact Service office Air cooling unit optional accessory ...

Page 10: ...tall the STP Pump 4 9 4 3 1 Cleaning the Seal 4 10 4 3 2 STP Pump Installation Positions 4 11 4 3 3 How to Secure the STP Pump 4 12 4 3 4 Legs for Securing the Base 4 16 4 3 5 Vacuum Piping 4 17 4 3 6 Connecting the Purge Port For the corrosion resistant pump 4 19 4 3 7 Connecting the Vent Valve 4 20 4 4 External Power Supply Unit 4 22 4 5 Connecting the DC Power Cable 4 22 4 6 Connecting to Vacuu...

Page 11: ... Up 9 2 9 2 1 Serial Port 9 2 9 2 2 Connecting the RS485 9 3 9 2 3 Communication Parameter Setting 9 4 9 2 4 Input Operation Port Setting 9 4 9 2 5 Serial Communication Timeout Setting 9 5 9 2 6 Recommended items about communication cable installation 9 6 9 3 Protocol Specifications 9 9 9 3 1 General Description 9 9 9 3 2 Standard Transmission Frame in the RS232 RS485 Single Point Connection 9 9 9...

Page 12: ...12 1 12 2 Contents of WARNING Function 12 2 12 2 1 Damage Limit 12 2 12 2 2 Pump Run Time Over 12 2 12 2 3 Imbalance 12 2 12 3 WARNING Function Setting 12 3 13 Troubleshooting Maintenance and Inspection 13 1 13 1 Troubleshooting Immediately after Failure Occurs 13 1 13 1 1 After Power Failure 13 1 13 1 2 After Other Abnormality Error 13 1 13 2 Troubleshooting 13 2 13 2 1 Indication of FAILURE LED ...

Page 13: ...X7 8 2 Table 8 3 Suitable Parts for Connector X7 8 2 Table 9 1 Pin Assignment for Connector X3 9 2 Table 9 2 Communication Parameters 9 4 Table 9 3 Remote Operation Mode 9 4 Table 9 4 Serial Communication Time Out Setting 9 5 Table 9 5 Transmission Control Characters 9 9 Table 9 6 Pump Operation Commands 9 16 Table 9 7 Command List 9 21 Table 9 8 Pump Operation Commands 9 23 Table 9 9 Error Values...

Page 14: ...r Air cooling Unit U0 64 5 4 Figure 5 5 Installation Procedure for Air cooling Unit U1 64 5 5 Figure 6 1 Pump Operation Method 1 6 3 Figure 6 2 Pump Operation Method 2 6 3 Figure 6 3 ROTATION LED Indication 6 5 Figure 7 1 X2 REMOTE Pin Arrangement 7 1 Figure 7 2 X2 REMOTE Input Signal Pins 7 4 Figure 7 3 X2 REMOTE Output Signal Pins 7 7 Figure 9 1 Serial Port 9 1 Figure 9 2 RS485 Connections 9 3 F...

Page 15: ...atment Introduce a dry N2 gas purge gas to protect the inside of the STP pump when using reactive or corrosive gas The use of reactive or corrosive gas may result in product damage DO NOT use any pyrophoric gas Cool the STP pump to prevent the STP pump from overheating when pumping gases 1 2 Maintenance and Inspection Precautions Perform any maintenance or inspection of the STP pump following Sect...

Page 16: ...ccording to the precautions of Section 4 Installation of the STP Pump 2 Rotational Direction Instruction Label This label describes the rotational direction of the STP pump The STP pump rotates in this direction 3 Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump The control unit will become high temperature while the STP pump is in operati...

Page 17: ...e magnetic bearings that consist of radial electromagnet 3 A pair of axial electromagnets 4 supports the rotor in the axial direction Because the rotor is entirely magnetically supported it rotates with low vibration Moreover STP iXL455 series with which the structure of low vibration and low noise 6 and 7 are equipped suppresses vibration and noise more than STP iX455 series There is less heat ge...

Page 18: ...n a STP iX455 Series b STP iXL455 Series Figure 2 1 Cross Sectional View of the STP Pump 1 Rotor blade 2 Stator blade 3 Radial electromagnet 4 Axial electromagnet 5 Touch down bearing 6 Structure for reduce vibration level 7 Structure for electrical isolation ...

Page 19: ...e packaging materials such as the corrugated fiberboard container and cushioning material for possible reuse 3 2 Accessories Table 3 1 Accessories Item Q ty Remarks Instruction Manual 1 This manual Inlet port cover 1 Outlet port cover 1 Connector for X1 DC POWER 1 Model NJC 207 PF Nanaboshi Electric Mfg Co Ltd Cable bushing Model NJC 20 CB Nanaboshi Electric Mfg Co Ltd Connector for X2 REMOTE 1 D ...

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Page 21: ...nt valve attachment This port is only attached on the corrosion resistant pump type C or other models or on pumps designed for use with a vent valve Introduces a purge gas in order to protect the inside of the STP pump when pumping reactive or corrosive gases The vent valve when installed reduces the stopping time of the STP pump The STP pump is delivered with a blank flange attached to this port ...

Page 22: ...ion Manual 4 2 Installation 4 1 2 3 5 6 7 FAILURE ROTATION POWER X5 STP Link X6 VENT VALVE X2 REMOTE X1 DC POWER X4 X3 COM1 1 Inlet Port Flange 2 Outlet Port Flange 3 Purge Port 4 Control Unit Figure 4 1 Configuration of the STP Pump ...

Page 23: ...Front panel 1 VENT VALVE connector X6 For the vent valve optional accessory attached in the purge port Refer to Section 4 3 7 Connecting the Vent Valve or Section 8 1 Vent Valve Output for details of the connector X6 2 OPTION PORT connector X4 COM4 with cover For the network unit optional accessory F 1 2 3 4 5 6 7 8 9 10 4 1 2 3 5 6 7 FAILURE ROTATION POWER X5 STP Link X6 VENT VALVE X2 REMOTE X1 D...

Page 24: ...arning of the STP pump is indicated by flashing of the orange LED The flashing pattern indicates the warning type Refer to Section 12 WARNING Function 7 STP Link connector X5 COM2 For the communication cable of the STP Link optional accessory or the display unit iDT 001 optional accessory These optional accessories can operate the STP pump confirm the operation state or change various settings 8 C...

Page 25: ...Manual 4 5 Installation Figure 4 3 Control Unit Rear panel 11 FAN connecter X7 Power supply for the air cooling unit optional accessory See Section 8 2 Air cooling Unit Output and General purpose Output for details of the connector X7 11 ...

Page 26: ...c reactive or combustible gas Dilute the gas to be used with the inert gas controlled if necessary And take measures according to MSDS to prevent an accident caused by exhaust gas Chlorine or fluorine system gases can be used only in corrosion resistant pumps type C or other models When you use gases including alkaline metals but excluding Li gases including Ga Hg Sn or HBr contact Edwards NEVER u...

Page 27: ... STP pump A place free of a strong electric field A place free of a source of electric noise A place free of radiation No discharge of high voltage more than 500 V If more than 500 V is discharged contact Edwards A place free of exposure to direct sunlight A place free of high humidity A place free of dust A place free of salty air A place free of dripping water A place free of explosive or flamma...

Page 28: ...d with a high speed rotor Any internal abnormality error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage Design and secure the bench for the STP pump so that it can withstand the maximum torque generated due to the occurrence of an abnormality error Refer to Section 4 3 3 How to Secure the STP Pump for abnormal torque Secure the customer prepared...

Page 29: ...ll When lifting by hands for unavoidable reason two or more people must always conduct it Install the STP pump to the vacuum equipment as shown in Figure 4 4 Figure 4 4 Installation of the STP Pump to the Vacuum Equipment X2 REMOTE Backing pump Remote operation cable DC power cable Vacuum equipment Inlet port Inlet port flange Dry pump and other External power supply unit 48V DC Outlet port flange...

Page 30: ...he solvent alcohol Dispose of the contaminated wipes appropriately according to the regulations of each national and or local government The splinter shield cannot perfectly prevent foreign materials from falling into the STP pump DO NOT install the STP pump in such a manner that foreign materials can easily fall into it for example Si wafers or samples are positioned above the STP pump If install...

Page 31: ...of precedence shown below 1 The direction of the outlet port is on a vertical plane in the direction of the gravity see Figure 4 6 a i 2 The direction of the outlet port is on a horizontal plane in the direction of the gravity and the control unit is in the upper position see Figure 4 6 b ii 3 The direction of the outlet port is on a horizontal plane in the direction of the gravity and the control...

Page 32: ... torque Design and secure the mounting for the STP pump so that it can withstand this destructive torque Refer to Table 4 3 for destructive torque values Refer to Table 4 2 for tightening torque of the bolt Table 4 2 Tightening Torque of Bolt Size of bolt Tightening torque of bolt Nm M8 12 M10 24 M12 42 When securing on the pump base side or using any securing method other than that specified in t...

Page 33: ...gs Follow CAUTION in Section 4 3 4 about legs and bolts for securing the base Table 4 3 Destructive Torque and Recommended Securing Bolt for Inlet Port Flange Model STP iX455 iXL455 Flange type VG100 VG150 ISO100F ISO100 ISO160F ISO160 ICF152 ICF203 Torque in pump abnormality kNm 4 1 4 1 4 1 Recommended securing bolt Shape of bolt Standard Standard Standard Steel type 1 Stainless steel Stainless s...

Page 34: ...or all 4 legs Follow CAUTION in Section 4 3 4 about legs and bolts for securing the base For the claw clamp type use the required number of claw clamps as specified in Table 4 4 Position the claw clamps evenly on the circumference Table 4 4 Number of Claw Clamps by Size of Flange Size of Flange Number of Claw Clamps ISO160 or less 4 or more ISO200 to 250 6 or more ISO320 or more 8 or more Figure 4...

Page 35: ...gn install the pump with a torque restraint shown in Figure 4 9 Use a damper only at the vertically upright position DO NOT remove the bolts and nuts attached to reinforce the damper Figure 4 9 Example of Securing the STP Pump When installing the damper in the inlet port flange Secure the base Hole to prevent from rotating Leg Damper clamps Damper clamps Vacuum equipment Vacuum equipment 4 1 2 3 5...

Page 36: ...securing the base use stainless steel securing bolts with a tensile strength class is 70 or more The legs for securing the base are not included Procure the legs at your company It is recommended to make legs in the configuration shown in Figure 4 10 Figure 4 11 shows the position of the screw holes for the legs Figure 4 10 Recommended Leg for Securing Base Figure 4 11 Position of the Screw Holes ...

Page 37: ...ng method simultaneous starting starting after generating roughing vacuum suitable for the vacuum equipment you use 5 Connect the STP pump and the backing pump using stainless steel or aluminum alloy tubing flexible tubing vacuum rubber or Teflon tubing and other The following measures can be used to avoid the transmission of the vibration of the backing pump to the STP pump and the vacuum equipme...

Page 38: ... flange applicable continuously Piping at the Outlet Port Flange Attach the outlet port to the inlet port flange of the backing pump primary side pump Refer to Table 15 1 Specifications for the STP Pump for the allowable backing pressure pressure at the outlet port flange applicable continuously To attain the ultimate pressure shown in Table 15 1 Specifications for the STP Pump set the pressure at...

Page 39: ...models introduce a dry N2 gas or other inlet gas into the STP pump in order to protect the inside of the STP pump As shown in Figure 4 12 introduce a dry N2 gas through needle valve or similar valve must be provided by the customer into the purge port For instructions on how to introduce the purge gas see Section 5 3 Gas Pumping Figure 4 12 Connecting the Purge Port Purge port KF10 Dry N2 gas or o...

Page 40: ...TP pump see Figure 4 13 Connect the vent valve to the purge port shown in Figure 4 12 Figure 4 14 shows example of a control method when introducing the atmosphere from the primary side of the vent valve Refer to Section 8 1 Vent Valve Output for the operation A Purge port diameter VCR 1 4 B Purge port diameter KF10 Figure 4 13 Vent valve connection Figure 4 14 Example of a control method when int...

Page 41: ...osphere or dry N2 gas at 8 4 10 1 Pa m3 s 500 SCCM or less when introducing from the vent valve The atmosphere or dry N2 gas introduction at the vent valve may result in a noise This is not abnormality error When not using the purge port close it with the blanking flange attached on delivery ...

Page 42: ...rmation on preparing the DC power cable at your company and then connect the power supply line to the No 1 and 2 pins The DC power cable is not included Procure it at your company The iPS 240 connection cable is not included with the power supply unit optional accessory Contact the distributor when purchasing it Figure 4 15 DC Power Cable Table 4 5 Suitable Parts for DC Power Cable Name Model numb...

Page 43: ...xternal power supply unit to No 1 and No 2 pins of the connector X1 Failure to do so may result in product damage Refer to the iPS 240 Instruction Manual for the operation of the power supply unit optional accessory No 2 pin 0VA and No 7 pin FG of the connector X1 are connected internally to the pump body and other metallic components The STP pump mounts 7 A fuse in DC power supply input line as o...

Page 44: ...ipment will interrupt electrical power to the STP pump When the power is shut off the STP pump will coast down and eventually land on the touch down bearings Consider the followings when establishing the EMO circuit Unite the exhaust gas system to prevent atmosphere from being introduced into the STP pump when the EMO circuit operates example shut the valve When atmosphere is introduced into the S...

Page 45: ...20 C or lower DO NOT pump gases during baking to prevent overheating To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump run the STP pump during baking 5 1 1 Attaching a Baking Heater The baking heater is not included in the scope of supply When preparing the baking heater at your company refer to the external appearance on each Instruction Manual of the STP ...

Page 46: ...l accessory when cooling the STP pump The air cooling unit U0 64 cools only control unit The air cooling unit U1 64 cools both STP pump and control unit Select the best method which fits your vacuum equipment Air cooling fan Cooling area Condition Baking Gas pumping 1 SCCM Environment U0 64 Control unit N2 0 to 180 Areas of high humidity Areas subjected to heat source Ar 0 to 100 U1 64 Pump and co...

Page 47: ...n When installing the air cooling fan and bracket use attached screws or screws equivalent to the attached screws Make sure the finger guard is installed to the air cooling fan Failure to do so may allow fingers or foreign objects come in contact with fan blade which may injure operators or result in product damage When the STP pump is in the power ON state or backup operation the air cooling unit...

Page 48: ...hen the air cooling fan U1 64 is attached remove it before the installation see Section5 4 Air cooling Unit U1 64 2 Fix the finger guard and air cooling fan to the rear panel of the control unit with fixing screws 4 pcs M3 x 25 3 Connect the fan cable to X7 FAN connecter Figure 5 4 Installation Procedure for Air cooling Unit U0 64 Remove the air cooling fan from the STP pump by reversing the insta...

Page 49: ...cket U111 3 Attach the fan to the bracket U111 in a way that marks to be opposite each other so that the fan cable locates on the radiating fin side of the control unit 4 Fix the finger guard and air cooling fan to the bracket U111 with fixing screws 4 pcs M4 x 35 5 Remove the sticker from the finger guard and air cooling fan and then connect the fan cable to X7 FAN connecter Figure 5 5 Installati...

Page 50: ...ol the STP pump to prevent the STP pump from overheating when pumping gases see Section 5 2 Cooling the STP Pump 5 5 1 How to Introduce a Purge Gas For corrosion resistant pump When pumping reactive or corrosive gases introduce a purge gas to protect the inside of the STP pump The use of reactive or corrosive gas may result in product damage Connect a needle valve or a similar part to the purge po...

Page 51: ... pump secured according to the appropriate method 2 Is the external power supply unit connected correctly to the main power 3 Are the external power supply unit and STP pump connected with the DC power cable 4 Is the power voltage properly 5 Is each connector securely connected Is each terminal and connector securely locked 6 2 Start Procedures Start the backing pump before or simultaneously with ...

Page 52: ...ing Set the hardware which operates the STP pump before the operation The STP pump is equipped with the parallel port X2 REMOTE connector serial port COM1 X3 COM1 connector and serial port COM2 X5 STP Link connector as standard hardware for the operation Serial port COM3 is available when connecting the power supply unit iPS 240 optional accessory The STP Link optional accessory and the display un...

Page 53: ...tion with the parallel port Use one of them Table 6 1 Starting Stopping the STP Pump X2 REMOTE Method Starting the pump Stopping the pump 1 1 Short the circuit between 1 14 2 Short the circuit between 2 14 for 0 3 seconds or more However when inputting this signal simultaneously with switching ON the external power supply short the circuit between 2 14 for 10 seconds or more Open the circuit betwe...

Page 54: ...se of the abnormality error after the ROTATION LED extinguishes and perform the operation shown in Table 6 2 The FAILURE LED extinguishes and the safety function is released RESET operation Then restart the STP pump For the safety functions and troubleshooting see Section 11 Safety Functions and Section 13 Troubleshooting Maintenance and Inspections Table 6 2 Reset Operation X2 REMOTE Method Reset...

Page 55: ...0 rpm Continuous flash 49 500 to 55 000 rpm Steady see Figure 6 3 FAILURE orange red Warning state Flashing orange The flashing pattern of the LED indicates the type of warning See Section 12 WARNING Function Failure state Flashing or steady red The flashing pattern of the LED indicates the type of failure See Section 11 Safety Functions and Section 13 Troubleshooting Maintenance and Inspection ON...

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Page 57: ...he parallel mode This connector is of D Sub 1 type 25 pins socket type The screw for connector is M2 6 Figure 7 1 X2 REMOTE Pin Arrangement The connector pin type for remote connection is included Procure control equipment at your company It is recommended to use the remote cable of the shield type grounding both ends 1 D Subminiature connector Conforms to MIL C 24308 25 13 12 2 1 24 15 14 ...

Page 58: ...the STOP signal 1 When 1 above is used to start the STP pump open the circuits between 1 14 to stop the STP pump 2 When 2 above is used to start the STP pump open the circuits between 1 2 to stop the STP pump Pins for inputting the RESET signal When a safety function operates remove the cause of the abnormality error after confirming the STP pump has stopped When the cause of the abnormality error...

Page 59: ...ration port see Section 7 1 1 Pins for inputting the rotation INHIBIT enable signal The input pins are valid even when input operation port is set to serial port When the pins between 24 25 are short circuited the rotation INHIBIT signal input is enabled Pins for inputting the vent valve enable signal When the pins between 24 12 are short circuited the vent valve connected to the connector X6 is c...

Page 60: ... inhibit signal Input port select signal Rotation inhibit enable signal Vent valve enable signal 1 24 2 14 15 3 13 25 12 In case of Start 2 Figure 7 2 X2 REMOTE Input Signal Pins COM pins 1 24 pin are isolated from the frame ground The input current of remote input signal is approx 5 mA Make sure the minimum applicable load of the relay contact when the remote operation with the relay It is recomm...

Page 61: ...rallel port Open Parallel port Serial port COM1 to COM4 7 1 2 Rotation INHIBIT Signal When using rotation INHIBIT signal short circuit the INHIBIT ENABLE IN signal Relations between rotation INHIBIT signal input and pump operation state are shown in Table 7 3 Table 7 3 Rotation INHIBIT Signal Input Signal input Pump operation After short circuit of rotation INHIBIT input signal A the START operati...

Page 62: ...ration Pins for outputting the NORMAL OPERATION state signal When the STP pump is in rated operation the pins between 18 6 are closed and the pins between 19 6 are opened Pins for outputting the BRAKE state signal These pins are closed when the STP pump is in brake Pins for outputting the FAILURE signal When an abnormality error is detected the pins between 8 21 are closed and the pins between 9 2...

Page 63: ...nal output pins ACCELERATION state signal output pins NORMAL OPERATION state signal output pins BRAKE state signal output pins FAILURE state signal output pins WARNING state signal output pins PARALLEL PORT SELECT state signal output pins Figure 7 3 X2 REMOTE Output Signal Pins Table 7 5 shows the rated contacts for relays CR1 to CR7 in Figure 7 3 Table 7 5 Rated Contacts for Relays CR1 to CR7 Res...

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Page 65: ...truction Manual or the Instruction Manual of the STP Link optional accessory or the display unit iDT 001 optional accessory When the vent valve function is enabled the valve is controlled according to the setting values during deceleration state There are two settings the vent valve starting speed and vent valve running time which can be set by customer Table 8 1 Vent Valve Operation Setting Item ...

Page 66: ...7 pin assignment Function Outline 1 24 V DC 2 V 0 2 A 2 0 V When connecting disconnecting cables always turn OFF the external power supply Failure to do so may result in electric shock or product damage See Section 5 2 Cooling the STP Pump for details 8 2 2 Using as a General purpose Power Supply Connect the equipment to the connector X7 using the parts listed in Table 8 3 The rated current of the...

Page 67: ...cation STP link optional accessory or the display unit iDT 001 optional accessory see Figure 9 1 A serial port located the STP pump is called a serial interface module hereafter referred to as SIM The equipment which can communicate with the STP pump via RS232 RS485 is called a PC Figure 9 1 Serial Port STP Pump PC User application COM1 X3 COM1 connector COM4 X4 OPTION PORT connector optional acce...

Page 68: ...The screw for the connector X3 is M2 6 The RS232 and RS485 share the connector X3 The default setting is RS232 When using the RS485 change the communication parameter setting via STP Link optional accessory or the display unit optional accessory Refer to Section 9 2 3 The length of the communication cable should be less than 15 m when using RS232 See Section 9 2 2 when using RS485 2 Serial Port CO...

Page 69: ... Use the PC of which transmit receive switch time is 5 msec or less Use twisted pair wire in communication cable The extended communication cables should be 1 2 km or less Connect the terminator to the communication devises at both ends of the transmission line The terminator 120 Ω 0 25 W is required for connection the STP pump does not have terminator setting function PC 7 D 8 D 120Ω 120Ω SIM Con...

Page 70: ... IN signal between 24 13 of the X2 REMOTE connector If the pins are closed the input operation port will be set to the parallel port automatically and the input operation via the serial port is disabled refer to Section 7 Remote Input Output Signal Connector for the details of the X2 REMOTE connector 2 Set the parameter of the Remote Operation Mode to the serial port which operates STP pump follow...

Page 71: ...r the display unit iDT 001 optional accessory Design the user application so that the PC can communicate with the STP pump at fixed regular intervals within the setting time except when the function is disabled the value is 0 Table 9 4 Serial Communication Time Out Setting Default Setting Range Remark Serial communication time out setting 1 min 0 to 500 min 1 min step The function is disabled when...

Page 72: ...ower supply line Shield both ends are grounded by all the cables of connected communication device Clamp the STP pump side shield on a connector hood A ground loop will be made up through both ends grounding Connect between GND of a STP pump and PC with low impedance to prevent ground potential difference SIM Signal line GND PC Signal line GND Low impedance connection to prevent ground potential d...

Page 73: ... ferrite cores to the cable is effective to reduce communication failure Figure 9 5 Example of ring ferrite core installation Locate and secure the cables It may be difficult to measure the reproducibility of the communication failure without securing the cables Avoid installing a power line and a communication line in the same metallic duct When unavoidable separate a line with a metal separator ...

Page 74: ...unication interfaces or static electricity is applied to communication line Communication failure occurs frequently by broken communication interface circuit RS485 is available with communication interface circuit according to the environment but it gets failure easily Check the waveform of the differential signal is normal with measuring instruments such as an oscilloscope D D D D a Normal b Abno...

Page 75: ... Characters ASCII character HEX code Function Transmission layer Stx 02 Transmission block start character Etx 03 Transmission frame end character Etb 17 Transmission block end character Ack 06 Acknowledgment response Nak 15 Non acknowledgment response 40 Network frame ID character Application layer 23 Acknowledgment response 21 Non acknowledgment response 9 3 2 Standard Transmission Frame in the ...

Page 76: ... parameter Sp CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input Sp and CHR only to the top transmission block the first transmission block of the transmission frame It is not necessary to input them to the 2nd and ...

Page 77: ...if necessary 9 3 4 Query Command in the RS232 RS485 Single Point Connection A query command is used to read the pump operation state and setting values The first character of the query command in the RS232 RS485 single point connection is HEX code 3F and succeeding characters are ASCII characters corresponding to the respective function code and parameter CHR C1 C2 Cn CHR Function code character C...

Page 78: ...0 2 C254 Cn Etx LRC The PC transmits Ack or Nak then transmits the next command if necessary 9 3 5 Transmission Data Format Data value is always 16 bits signed hexadecimal value coded ASCII text Example 12090 on a decimal basis equals to 2F3A on a hexadecimal basis 9 3 6 Frame Control Checksum The transmission frame is controlled by the odd number parity check First initialize LRC as FFhex Next ca...

Page 79: ... the transmission frame in the RS485 multi point connection Network frame No is specified by any 16 bits signed hexadecimal value coded ASCII text alphabets are in capitals of 1 to 127 to identify the SIM Examples Network frame ID character and No in the multi point connection ASCII 0 1 Network frame No 1 HEX 40 30 31 ASCII 6 4 Network frame No 100 HEX 40 36 34 ASCII 7 F Network frame No 127 HEX 4...

Page 80: ...w Sp CHR C1 C2 Cn CHR Function code character C1 to Cn Parameter Parameter from C1 to Cn serves as 16 bits signed hexadecimal value coded ASCII text When a message a space character a function code and parameter exceeds 255 characters input Sp and CHR only to the top transmission block the first transmission block of the transmission frame It is not necessary to input them to the 2nd and succeedin...

Page 81: ...smits the next command if necessary 9 3 10 Query Command in the RS485 Multi point Connection The query command to be used when a pump operation instruction or a setting change instruction is transmitted from the SIM is arranged in the order specified below The top is HEX code 3F and ASCII characters corresponding to the respective function code and parameter follow CHR C1 C2 Cn CHR Function code c...

Page 82: ... sent by the SIM PC character in reaction to the response 1st block from the SIM the SIM returns the following response 2nd block PC SIM Ack or Nak F1 F2 SIM PC F1 F2 Stx 0 0 2 C254 Cn Etx LRC The PC transmits Ack or Nak then transmits the next command if necessary 9 3 11 Broadcasting Command in the RS485 Multi point Connection START or STOP of pump operation command allows to be concurrently inst...

Page 83: ...ss example The SIM will reply ACK or NAK within approximately 2 seconds after receiving command When there is no reply the SIM may not have received the command In this case resend the command from the tool application before recognizing the process of the communication failure If the problem cannot solve after resending several times make the process of the communication failure on tool applicati...

Page 84: ...is incorrect value Figure 9 9 Example of answer resending process When sending the following command before receiving the answer data from the SIM the contents of the answer data and sent command from the SIM will not match In this case stop the communication about approximately 5 seconds to clear all the receiving buffer of the tool application and then start the communication again PC SIM ACK Re...

Page 85: ...First TMP RS485 multipoint connection Address selection Next TMP Communication cycle end Command sending process Succeeded Answer receiving process Yes This procedure is not necessary if TMP connection number 1 No Yes Yes Yes Yes No No No No RS485 multipoint connection Address check Last TMP Figure 9 12 Example of communication cycle process ...

Page 86: ...es No Yes Block check k N 1 Acknowledge received ACK received Figure 9 13 Example of command sending process This procedure is not necessary if N 1 1 When using RS485 multipoint connection also an address is incorrect 2 When using RS485 to communicate send after 1 msec or more progress from block data received 3 When using RS485 multipoint connection send with address data Receive answer N blocks ...

Page 87: ...Warning Reads the pump operation mode the errors and the warnings being detected ReadMeasValue Reads the motor temperature motor current measured rotational speed and control unit temperature ReadOptionFunc Reads each setting value of items 3 Sp SetOptionFunc Changes each setting value of items 2 3 ReadCondition Reads pump model and damage point 3 ReadEventsWithTime Reads the error record with det...

Page 88: ... Ack PC SIM Ack SIM PC Stx 0 0 1 Sp D Parameter 1 to 2 Etx LRC Parameter Item Data format Remarks 1 System reservation 56 bits hexadecimal coded ASCII 2 Measured rotational speed Unit Hz 16 bits hexadecimal coded ASCII Example Measured rotational speed 0395hex 917 Hz 55 020 rpm Parameter 1 2 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 3 9 5 HEX 30 33 39 35 1 System reservation ...

Page 89: ... Port Setting and Section 9 4 15 SetOptionFunc for the setting method of the input operation port Transmission Frame PC SIM Stx 0 0 1 Sp E Parameter 1 Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Etx LRC Parameter Item Data format Remark 1 Pump operation command 8 bits hexadecimal coded ASCII See Table 9 8 Table 9 8 Pump Operation Commands Pump operation command Value START 1 STOP 2 RESET 4 Exam...

Page 90: ...application is designed as variable length data 2 Value corresponding to the error is transmitted see Table 9 9 The recent error has the largest parameter number When the number of errors being detected is under the maximum number the value of parameter that is larger than the number of errors being detected is set to 0 Example The number of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Err...

Page 91: ... System reservation 60 System reservation 21 Record Failure 61 System reservation 22 System reservation 62 System reservation 23 System reservation 63 DRV Com Failure 24 System reservation 64 WARNING Damage Limit 25 1 System reservation 65 System reservation 26 System reservation 66 System reservation 27 System reservation 67 Speed Pulse Lost 28 System reservation 68 Overspeed 2 29 System reservat...

Page 92: ...ed ASCII See Table 9 10 2 The number of error 8 bits hexadecimal coded ASCII Up to 79 errors 1 3 81 1 Error 1 8 bits hexadecimal coded ASCII 2 Error 79 1 8 bits hexadecimal coded ASCII 1 The maximum number of errors may differ depending upon the software version of STP pump It is recommended that an application is designed as variable length data 2 Value corresponding to the error is transmitted s...

Page 93: ...umber of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 79 00hex No error detected Parameter 1 2 3 4 5 6 7 8 9 10 ASCII 0 1 0 2 0 D 0 F 0 0 0 0 0 0 0 0 0 0 0 0 HEX 30 31 30 32 30 44 30 46 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 11 12 13 68 69 70 ASCII 0 0 0 0 0 0 Omitted 0 0 0 0 0 0 HEX 30 30 30 30 30 30 30 30 30 30 30 30 Parameter 71 72 73 74...

Page 94: ...rol loop 4 bits ASCII character Ver 3 4 0340 1 Analog control loop 4 bits ASCII character FFFF fixed 1 1 STP iX455 iXL455 series use a digital control loop Example Control unit software version 36345F4120312E302020202020202020hex 64_A 1 0 Motor driver software version 0120 hex 1 2 AMB software version 0340 hex 3 4 Parameter 1 2 3 4 5 6 7 8 6 4 _ A 1 0 ASCII 3 6 3 4 5 F 4 1 2 0 3 1 2 E 3 0 HEX 33 3...

Page 95: ... 22 Control unit running time Unit minute 32 bits hexadecimal coded ASCII 23 Start counter 32 bits hexadecimal coded ASCII Example Control unit serial number 12345 Pump serial number 6789A Pump running time 0000003Chex 60 minutes 1 hour Control unit running time 0000028Chex 652 minutes 10 hours 52 minutes Start counter 00000064hex 100 times Parameter 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19...

Page 96: ...ed motor temperature Transmission Frame PC SIM Stx 0 0 1 e Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp e Parameter 1 Etx LRC Parameter Item Data format Remark 1 Motor temperature Unit C 16 bits hexadecimal coded ASCII Example Motor temperature 0014hex 20 C Parameter 1 ASCII 0 0 1 4 HEX 30 30 31 34 ...

Page 97: ...o the error is transmitted see Table 9 9 The recent error has the smallest parameter number When the number of errors being detected is under the maximum number the value of parameter that is larger than the number of errors has been detected is set to 0 Example When 3 errors have been detected in the past The number of Error Record 03hex 3 errors Error Record 1 0Fhex 15 Disturbance Xb Error Recor...

Page 98: ... it not only may become impossible to change the setting but can also cause pump failure Do not make setting changes in excess of this endurance limit Transmission Frame PC SIM Stx 0 0 1 Sp h Paramert 1 Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Etx LRC Parameter Items Data format Remark 1 Speed Set Point Unit Hz 16 bits hexadecimal coded ASCII 1 1 When the value set to the parameter is larger...

Page 99: ... same as ReadSetPoint parameter 1 Speed Set Point Transmission Frame PC SIM Stx 0 0 1 h Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp h Parameter 1 Etx LRC Parameter Item Data format Remark 1 Speed Set Point Unit Hz 16 bits hexadecimal coded ASCII Example Speed Set Point 0320hex 800 Hz 48 000 rpm Parameter 1 ASCII 0 3 2 0 HEX 30 33 32 30 ...

Page 100: ... being detected 16 bits hexadecimal coded ASCII See Table 9 11 3 The number of errors detected 8 bits hexadecimal coded ASCII Up to 79 errors 1 4 to 82 1 Error 1 8 bits hexadecimal coded ASCII 2 Error 79 1 8 bits hexadecimal coded ASCII 1 The maximum number of errors may differ depending upon the software version of STP pump It is recommended that an application is designed as variable length data...

Page 101: ...servation 8000 Example Pump operation mode 01hex 1 Levitation WARNING being detected 000Chex 0004hex OR 0008hex 2 warnings of WARNING Damage Limit WARNING Imbalance X_H The number of error 02hex 2 errors Error 1 0Dhex 13 Disturbance Xh Error 2 0Fhex 15 Disturbance Xb Error 3 to 79 00hex No error detected Parameter 1 2 ASCII 0 1 0 0 0 C HEX 30 31 30 30 30 43 Parameter 3 4 5 6 7 8 9 10 11 12 ASCII 0...

Page 102: ...C Ack PC SIM Ack SIM PC Stx 0 0 1 Sp Parameter 1 to 8 Etx LRC 1 The HEX code of ASCII character is 5B Parameter Item Data format Remarks 1 System reservation 136 bits hexadecimal coded ASCII 2 Motor temperature Unit C 16 bits hexadecimal coded ASCII 3 System reservation 8 bits hexadecimal coded ASCII 4 Motor current Unit 0 1 A 8 bits hexadecimal coded ASCII 5 System reservation 24 bits hexadecimal...

Page 103: ...5hex 917 Hz 55 020 rpm 8 Control unit temperature 0032hex 50 C Parameter 1 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 HEX Parameter 1 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 HEX Parameter 2 3 4 5 6 ASCII 0 0 1 4 1 1 1 9 1 1 1 1 1 1 0 3 9 5 HEX 30 30 31 34 31 39 30 33 39 35 Parameter 7 8 ASCII 1 1 1 1 1 1 1 1 1 1 1 1 0 0 3 2 HEX 30 30 33 32 1 System reservation ...

Page 104: ... hexadecimal coded ASCII 4 Vent valve starting speed setting Unit 8 bits hexadecimal coded ASCII 5 Vent valve running time setting Unit sec 16 bits hexadecimal coded ASCII 6 System reservation 16 bits hexadecimal coded ASCII 7 Damage Limit Warning Enable Disable setting 8 bits hexadecimal coded ASCII 8 Pump Runtime Over Warning Enable Disable setting 8 bits hexadecimal coded ASCII 9 Pump Runtime O...

Page 105: ...ng speed setting 10 to 80 0Ahex to 50hex 5 Vent valve running time setting 5 to 600sec 0005hex to 0258hex 7 Damage Limit Warning Enable Disable setting ENABLE 00hex DISABLE FFhex 8 Pump Runtime Over Warning Enable Disable setting ENABLE 00hex DISABLE FFhex 9 Pump Runtime Over Warning Hours setting 0 to 300 000 100 hours 00000000hex to 000493E0hex 10 Imbalance Warning Enable Disable setting ENABLE ...

Page 106: ...9 Pump Runtime Over Warning Hours 000186A0hex 100 000 x 100 hours 10 Imbalance Warning 00hex ENABLE 12 Serial communication time out 003Chex 60 sec Parameter 1 2 3 4 5 6 7 ASCII 0 1 1 1 1 1 F F 3 2 0 0 3 C 1 1 1 1 0 0 HEX 30 31 46 46 33 32 30 30 33 43 30 30 Parameter 8 9 10 ASCII F F 0 0 0 1 8 6 A 0 0 0 HEX 46 46 30 30 30 31 38 36 41 30 30 30 Parameter 11 12 13 ASCII 1 1 1 1 1 1 1 1 1 1 0 0 3 C 1 ...

Page 107: ...e setting 8 bits hexadecimal coded ASCII Default FFhex DISABLE 4 Vent valve starting speed setting Unit 8 bits hexadecimal coded ASCII Default 32hex 50 5 Vent valve running time setting Unit sec 16 bits hexadecimal coded ASCII Default 003Chex 60 sec 6 System reservation 16 bits hexadecimal coded ASCII 1 7 Damage Limit Warning Enable Disable setting 8 bits hexadecimal coded ASCII Default 00hex ENAB...

Page 108: ...000 x 100 hours 10 Imbalance Warning 00hex ENABLE 12 Serial communication time out 003Chex 60 sec Parameter 1 2 3 4 5 6 7 ASCII 0 1 F F F F F F 3 2 0 0 3 C F F F F 0 0 HEX 30 31 46 46 46 46 46 46 33 32 30 30 33 43 46 46 46 46 30 30 Parameter 8 9 10 ASCII F F 0 0 0 1 8 6 A 0 0 0 HEX 46 46 30 30 30 31 38 36 41 30 30 30 Parameter 11 12 13 ASCII F F F F F F F F F F 0 0 3 C F F F F F F HEX 46 46 46 46 ...

Page 109: ...0 0 1 Etx LRC SIM PC Ack PC SIM Ack SIM PC Stx 0 0 1 Sp Parameter 1 to 4 Etx LRC 1 The HEX code of ASCII character is 7B Parameter Item Data format Remarks 1 Pump model 160 bits hexadecimal coded ASCII 2 System reservation 32 bits hexadecimal coded ASCII 3 Damage point 16 bits hexadecimal coded ASCII 4 System reservation 64 bits hexadecimal coded ASCII 1 1 ...

Page 110: ... X 4 5 5 ASCII 5 3 5 4 7 0 2 D 6 9 5 8 3 4 3 5 3 5 2 0 HEX 35 33 35 34 37 30 32 44 36 39 35 38 33 34 33 35 33 35 32 30 Parameter 1 ASCII 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 2 0 HEX 32 30 32 30 32 30 32 30 32 30 32 30 32 30 32 30 32 30 32 30 Parameter 2 3 4 ASCII 1 1 1 1 1 1 1 1 0 0 3 2 1 1 1 1 1 1 1 1 HEX 30 30 33 32 Parameter 4 ASCII 1 1 1 1 1 1 1 1 HEX 1 System reservation ...

Page 111: ...f Error Record 8 bits hexadecimal coded ASCII 2 The maximum number of Error Record 8 bits hexadecimal coded ASCII Up to 20 for STP iX455 iXL455 3 to 22 Error Record 1 to Error Record 20 80 bits hexadecimal coded ASCII See Error Record Format 1 1 The recent error has the smallest parameter number Error Record Format Time information of error history has two formats that depend on the pump model Tot...

Page 112: ...0 0 0 0 1 7 7 0 HEX 30 44 30 30 30 30 30 30 31 33 38 38 30 30 30 30 31 37 37 30 In case of time flag 1 Parameter Item Data format Remarks a Error Code 8 bits hexadecimal coded ASCII 1 b Time flag 8 bits hexadecimal coded ASCII c Error detection time Format yymmddhhnn yy The last two digits of the year mm Month dd Day hh Hour 24 hour display nn Minute 40 bits hexadecimal coded ASCII 2 d System rese...

Page 113: ... Pump running time 000005A0hex 1 440 min 24 hrs Ctrl running time 000005DC hex 1 500 min 25 hrs Error Record 4 to 20 No error recorded Parameter 1 2 ASCII 0 3 1 4 HEX 30 33 31 34 Parameter 3a 3b 3c 3d ASCII 0 F 0 0 0 0 0 2 B F 2 0 0 0 0 2 D 6 9 0 HEX 30 46 30 30 30 30 30 32 42 46 32 30 30 30 30 32 44 36 39 30 Parameter 4a 4b 4c 4d ASCII 0 D 0 0 0 0 0 0 7 5 3 0 0 0 0 0 8 0 E 8 HEX 30 44 30 30 30 30...

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Page 115: ...0 1 shows the principal functions See the Instruction Manual of the STP Link for the detailed specification and operating method Table 10 1 Functions of STP Link Item Functions Operating function Start stop and failure reset operation of STP pump Confirmation function Operational state of STP pump Software version Serial No STP pump model Operation hours Number of starts Bearing damage integrated ...

Page 116: ...h an LCD and flat panel switches The display unit iDT 001 can be used with fixing to the front panel of the power supply unit iPS 240 or connecting the STP Link connector See the Instruction Manual of the Display unit iDT 001 for the detailed specification and operating methods STP Link BRAKE ACCEL STOP START NORMAL FAILURE POWER UP DOWN ENTER SELECT RESET 65 98 4 132 122 5 Figure 10 1 Display Uni...

Page 117: ... of the X2 REMOTE connector When the rotational speed goes down to approx 20 000 rpm the rotor lands on the touch down bearing and stops All lamps extinguish The STP pump does not detect a power failure of less than 2 seconds and the STP pump will continue to rotate 2 When the rotational speed is less than approx 20 000 rpm at a power failure The STP pump does not detect the power failure The roto...

Page 118: ...on normally due to disconnection of connectors or any abnormality error of the STP pump the rotor lands on the touch down bearing and stops The FAILURE LED red flashes and a failure signal is output from the X2 REMOTE connector 11 3 Excessive Vibration Disturbance When serious vibration or mechanical shock causes the rotor to come in contact with the touch down bearing due to external vibration im...

Page 119: ...80 C due to a ventilation malfunction external heat source failure of an air cooling unit optional accessory or other event the STP pump decelerates and stops The FAILURE LED red flashes and a failure signal is output from the X2 REMOTE connector 11 7 Overspeed When the rotational speed of the STP pump exceeds 58 500 rpm due to a failure in the motor driver the STP pump decelerates and stops The F...

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Page 121: ...ion Manual of the optional accessories for details Table 12 1 WARNING Function No Warning FAILURE LED Indication Priority 1 Damage Limit Touch down bearing warning function 3 flashes in orange High 2 Pump Run Time Over Pump runtime warning function 2 flashes in orange 3 Imbalance Excessive imbalance warning function 1 flash in orange Low 1 cycle Imbalance 1 flash in orange OFF Warning detection FA...

Page 122: ...nter that tracks the total running hours of the pump When the run time counter attains the setting value the Pump Run Time Over is detected When deposit accumulates inside the STP pump this function can be used to consider the time of the overhaul The setting value is user definable Confirmation of the total running hours of the pump and change of the setting value can be performed via serial comm...

Page 123: ...p Run Time Over is detected See Table 12 2 for the default setting The setting can be changed via serial communication the STP Link optional accessory or the display unit iDT 001 optional accessory Table 12 2 Default Setting of WARNING Function WARNING function Default setting Remarks Enable Disable Setting value Damage Limit ENABLE Pump Run Time Over DISABLE 0 hour Variable range 0 to 30 million ...

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Page 125: ...s 13 1 1 After Power Failure Re supply power to the STP pump as soon as possible after a power recovery 13 1 2 After Other Abnormality Error 1 After confirming the ROTATION LED has extinguished and the STP pump has stopped remove the probable cause of the abnormality When the FAILURE LED illuminates or flashes follow the recommended actions given in Table 13 2 Error List 2 Perform the RESET operat...

Page 126: ...ED indication Priority 1 Power Failure Overspeed and other Steady red High 2 MOTOR Overheat CNT Overheat 3 flashes in red 3 DRV Overload 2 flashes in red 4 Disturbance 1 flash in red Low 1 cycle Disturbance 1 flash in red OFF Failure detection FAILURE LED indication X2 REMOTE output ON DRV Overload 2 flashes in red MOTOR Overheat CNT Overheat 3 flashes in red Corresponding to failure type OFF OFF ...

Page 127: ...iring Contact Service office 2 flashes in red DRV Overload Decelerate and stop Acceleration state continues for approx 15 minutes 1 High pressure at the inlet port 1 Use the maximum working pressure or less 15 1 2 High pressure at the outlet port 2 Use the allowable backing pressure or less 15 1 3 Leakage of the piping system 3 Check the vacuum piping system for leakage 4 3 4 4 Failure of the back...

Page 128: ...nd stop Does not accelerate 1 500 rpm or more Failure of the control unit Contact Service office AMB Com Failure Decelerate and stop Communication failure with magnetic bearing control board Failure of the control unit Contact Service office AMP Overcurrent Touch down 1 Excessive magnetic bearing electric current Failure of the control unit Contact Service office DRV Com Failure Decelerate and sto...

Page 129: ... Failure of the external power supply 4 Set the voltage to 48 V DC 4 4 4 5 5 Abnormal AC main power voltage on the vacuum equipment 5 Check the AC main power voltage Ram Error Decelerate and stop Failure of RAM check in MPU Failure of the control unit Contact Service office Record Failure Decelerate and stop Failure of record in memory Failure of the control unit Contact Service office Serial Com ...

Page 130: ...ation INHIBIT signal does not function correctly Rotation INHIBIT enable signal input pins are opened Short the circuits between 24 25 of the X2 REMOTE connector 7 1 Insufficient ultimate pressure Failure of the backing pump Check the capacity and starting state use a backing pump having more capacity that we specified 4 3 4 15 1 Leakage of the piping system Check the piping system for leakage 4 3...

Page 131: ...l of the STP pump extinguished before performing maintenance and inspections of the STP pump Failure to do so may result in the inadvertent rotation of the STP pump which may result in an accident DO NOT touch any place other those specified when performing maintenance or inspecting the pump and NEVER open any panel because it could cause shock malfunction or short circuit Power OFF peripheral equ...

Page 132: ...fice When overhaul is needed contact Service office 13 3 2 Inspecting the Deposit Leaving the STP pump without removing the deposit may cause the STP pump to be corroded beyond repair Deposit may have accumulated inside the STP pump depending upon the type of the vacuum equipment installed in the STP pump An increase in the amount of deposit may lead to a malfunction of the STP pump Therefore perf...

Page 133: ...uire more frequent service includes non etching process Other etch process 2 years Other semiconductor process 2 years Clean application 5 years No gases used only vacuum pumping Other use 2 years Dependent on application contact Edwards 1 Etching includes semiconductor etching and LCD etching When STP pump detects warning it is essential to have the touch down bearings replaced regardless of the ...

Page 134: ...r main parts Part name Recommended maintenance intervals 1 Corrosive gas Inert gas or vacuum pumping only Rotor blades 3 years 5 years Rotor shaft 3 years 5 years Motor sensor electromagnet connector 5 years 7 years Air cooling fan 5 years Circuit board in the control unit 7 years Connection cable 5 years 1 Maintenance intervals of any parts may be shortened depending on the condition of use The c...

Page 135: ...Service office before returning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump particularly when corrosive reactive or flammable gases have been used ii Vacuum and hermetically seal the STP pump before transport iii Specify the type of gases used and handling precautions in the Return Declaration form and return the STP pump to S...

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Page 137: ...ures more than 55 C and low temperatures less than 25 C Place where there are corrosive gases Place subjected to dripping water Place with a lot of dust Place with insufficient ventilation Place subjected to strong magnetic or electric fields Place subjected to radiation Place subjected to direct sunlight Place subjected to mist Place with electric noise Place with vibration 14 2 Disposal Dispose ...

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Page 139: ...5 10 8 Maximum working pressure Natural air Pa Torr 1 3 10 1 1 10 3 Allowable backing pressure Natural air Pa Torr 67 0 5 Rated speed rpm 55 000 Rated speed variable range rpm 45 000 to 55 000 Starting time min 6 Stopping time min 8 Vibration μm 0 P 0 01 55 000 rpm 0 001 55 000 rpm Noise dB 50 55 000 rpm Leakage magnetic flux Axial direction mGauss 100 Radial direction mGauss 100 Baking temperatur...

Page 140: ... brushless motor driver Output voltage under normal operation Hz 750 to 917 Panel indication lamp POWER green LED ROTATION green orange LED FAILURE red orange LED Input Output terminal X1 DC POWER 7 pin circular connector X2 REMOTE 25 pin Dsub connector X3 COM1 RS232 485 9 pin Dsub connector X5 STP Link COM2 8 pin Mini DIN connector X6 VENT VALVE 4 pin circular connector X7 FAN 2 pin rectangular c...

Page 141: ...th side connectors Display unit iDT 001 Unit for operating or monitoring the STP pump or setting various settings Attachable to the front panel of the power supply unit iDT 001 harness is not included Dedicated communication cable is included 3m iDT 001 harness For the connection of Display unit iDT 001 and power supply unit iPS 240 STP Link Windows application for operating or monitoring the STP ...

Page 142: ... 108 Power cable connector Outlet port KF25 φ180 190 30ﾟ 30ﾟ 165 255 4 M12 Depth 25 Leg Fixing Hole 177 Ｂ 120 Ｂ φＡ φＡ 197 235 connector 237 purge port 266 167 205 connector 207 purge port 236 57 87 Inlet Flange A B ISO100 130 ICF152 VG100 ISO160 ICF203 VG150 152 12 21 182 180 235 203 12 12 22 12 Figure 15 1 External Appearance of the STP Pump STP iX455 series ...

Page 143: ...o t s u r f a c e φ 1 6 0 108 φ180 190 30ﾟ 30ﾟ 165 255 177 12 120 12 φ130 φ180 232 268 purge port 270 connector 301 218 254 purge port 256 connector 287 Inlet port ISO160 Inlet port ISO100 122 108 Power cable connector Outlet port KF25 Leg Fixing Hole 4 M12 Depth 25 Figure 15 2 External Appearance of the STP Pump STP iXL455 series ...

Page 144: ...R X5 STP Link X6 VENT VALVE X2 REMOTE X1 DC POWER X4 X3 COM1 X7 FAN Turbomolecular Pump SERIAL NO MANUFACTURING DATE WEIGHT 16 kg RATED SPEED 55 000 rpm MANUFACTURED BY Edwards Japan Limited 1078 1 Yoshihashi Yachiyo shi Chiba Japan STP iX455 CE POWER SUPPLY DC48V 5A Conforms to UL Std UL61010 1 9800546 T N I E R T E K D E T S I L CM US ...

Page 145: ...m mm inch 1 100 1 00x103 39 4 0 01 1 10 0 0 394 1x10 3 0 10 1 39 4x10 3 25 4x10 3 2 54 25 4 1 Mass g kg lb 1 1 00x10 3 2 20x10 3 1x103 1 2 20 454 0 454 1 Pressure Pa Torr kgf cm2 1 7 50x10 3 1 02x10 5 133 1 1 36x10 3 9 81 x 104 736 1 ...

Page 146: ...This page intentionally blank ...

Page 147: ...r more information contact the nearest Service Office Manufacturer Edwards Japan Limited 1078 1 Yoshihashi Yachiyo shi Chiba 276 8523 JAPAN Telephone Domestic 047 458 8853 International 81 47 458 8853 Facsimile Domestic 047 458 8048 International 81 47 458 8048 ...

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