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41)
EBARA
Corporation
6.6 Starting/stopping the pump with the LCD controller
Maximum two LCD controllers can be connected. Note only one of them can
start and stop the pump (the other shows the pump operational statuses).
The controller of which LED “LOCAL” is lit on has precedence over the other to
control the start and stop operation.
If only one controller is connected, the controller starts and stops the pump.
One controller
connected
Two controller connected
START/STOP Allowed
The one with its LED
“LOCAL” lit on is allowed.
When you use two controllers, disconnect the one which you will not use for the
operation from the pump once. Then, attach it again.