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29)
EBARA
Corporation
6.3 Setting the operational mode
This section describes how to set the operational mode. In the normal state, the
LCD controller displays pump status. To display the operational mode setting
screen, press the key “PRG.” for three seconds or longer. Pressing the key for one
second or longer again returns to the pump status display screen. Table 6.3 below
shows indications and the details of the operational mode setting.
Table 6.3 Operational mode setting screen
Item Indication
Description
Pump operation setting
mode
SET
CONTROL MODE?
Switches the control modes:
local /remote/communication.
DIP switch setting
SET
DIP SW?
To set DIP switchs (see 6.4).
Pump N
2
WARNING setting
SET POINT
PUMP N2 WARNING?
Sets the WARNING value for
N
2
flow.
WARNING value for the
backpressure setting
(option)
SET ALARM SP
BACK PRES. ?
Sets the WARNING value for
the backpressure.
Keys work as below for the setting screen.
START :
Valid
STOP
: Stops the pump.
RESET
: Resets WARNING and /or ALARM.
BZ.OFF
: Switches the DIP switch No.
▲
: Sets the DIP switch to ON. Switches the display of the operational
mode setting screen.
▼
: Sets the DIP switch to OFF. Switches the display of the operational
mode setting screen.
ENTER
: Determines the selected setting.
See Fig. 6.3 for how to set the operational modes.