(
37)
EBARA
Corporation
DIP SW-A. No. 7
(dip switch-A No. 7 lets you select whether dilution N
2
gas is
used or not. Set dip switch-A No. 7 to ON when the
production process does not lead to the formation of reaction
by-products in the pump or when the process uses
non-corrosive gases. Then close the N
2
gas selector valve to
save N
2
gas. Be sure always to use the N
2
gas selector valve
and dip switch-A No. 7 in combination.
[ NOTE ]
The
N
2
gas selector valve is positioned on the front panel at the right
when viewing facing the pump front panel (operating panel).
[ NOTE ]
It takes ten odd seconds until the flow has stabilized after you have
operated the N
2
gas selector valve.
DIP SW-A. No. 8
When dip switch-A No. 8 has been set to the REMOTE
(Remote Operation) position, it is possible to operate the
Booster Pump (BP) by selecting "AUTOMATIC Operation" or
"START/STOP in Response to External Signal Input."
DIP SW-B. No.6
Activate or inactive the special interface for ESA.
･
Set this to OFF to activate the interface (optional).
･
Set this to ON to inactivate the interface (default).
DIP SW-B. No.8
Locks or unlocks the currently selected operation status
display, which usually returns to the power display in 60
seconds.
DIP SW-C No.1
Can be select Normal Open / Normal Close of Pump N2
WARNING.
DIP SW-C No.3
Can be select Normal Open / Normal Close of Back
Pressure WARNING.