(x)
EBARA
Corporation
Contents
Environmental Basic Policies...........................................................................i
Safety Information ............................................................................................ii
Important Prior Warnings................................................................................iii
Standard Limited Warranty .............................................................................ix
Contents ............................................................................................................x
1. Foreword .......................................................................................................1
2. Introduction...................................................................................................1
2.1 Introduction.............................................................................................1
2.2 Environmental Concerns .......................................................................2
3. Product Description......................................................................................3
3.1 Outline .....................................................................................................3
3.1.1 Pump Module...................................................................................3
3.1.2 N2 Gas..............................................................................................3
3.1.3 Cooling Water ..................................................................................4
3.1.4 Exhaust ............................................................................................4
3.2 Control System ......................................................................................4
3.2.1 Warning ............................................................................................4
3.2.2 Operation Status Control................................................................5
3.3 The way of pump moving.......................................................................5
3.3.1 Preparation ......................................................................................5
3.3.2 Moving method................................................................................6
3.4 Detailed Specifications ..........................................................................7
4. Installation...................................................................................................12
4.1 Movement and Fixation........................................................................12
4.1.1 Location .........................................................................................12
4.1.2 Caster and adjustment foot ..........................................................12
4.2 Piping.....................................................................................................14
4.2.1 Vacuum and Exhaust Piping ........................................................14
4.2.2 Cooling Water Piping ....................................................................15
4.2.3 N2 Gas Piping ................................................................................16
4.2.4 Ventilation Duct .............................................................................17
4.3 Electrical Wiring ...................................................................................18
4.3.1 Grounding ......................................................................................18
4.3.2 Power Supply Wiring.....................................................................19