(
5)
EBARA
Corporation
When a ALARM output is suddenly generated, while the plant unit is operational,
an WARNING signal will be generated to ensure that the plant operation is not
discontinued. This enables the operator to check the pump after the equivalent of
one cycle has been completed.
Be sure to contact EBARA Corporation for details on checking the WARNING and
ALARM setting conditions.
• Note that the warning indications of the Model ESA70W(N) dry pump are
different from the conventional pumps like as UERR, A, AA, AAS series, based
on SEMI standard E73.
3.2.2 Operation Status Control
The sensor data are displayed on the LCD display provided on the controller to
facilitate operation status control and daily inspection.
All WARNING and ALARM signals are displayed on the LCD display. For remote
operation and monitoring, the signals are available as individual and group
outputs.
3.3 The way of pump moving
3.3.1 Preparation
Before pump moving, all adjuster feet shall be raised fully at four places.
In case of being not raised fully, pump may be tripped over by obstacle on floor.
fully
raised
Adjuster
Caster
UERR,A,AA, and
AAS
Model
ESA70W(N)
Alarm 1
(Pump operation continued)
ALARM WARNING
Alarm 2
(Pump stop)
TRIP ALARM