(
21)
EBARA
Corporation
Fig. 4.6 25 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.6 Control Connector Pin Assignment(CN-Y)
Pin No. Signal name
I/O
Signal type
1 RESET
(+)
IN RESET:CLOSE
2 RESERVED
(+)
IN
3 RESERVED
(+)
IN
4 RESERVED
(+)
IN
5 RESERVED
(+)
IN
6
EMO STATUS (+)
OUT
Abnormality : OPEN,Alternate
7
PUMP N2 WARNING STATUS (+)
OUT
Abnormality : CLOSE,Alternate*2
8 RESERVED
(+)
OUT
9 RESERVED
(+)
IN
10
BACK PRESSURE HIGH WARNING STATUS (+) *1
OUT
Abnormality : CLOSE,Alternate*2
11 RESERVED
(+)
OUT
12 RESERVED
(+)
OUT
13
14 RESET
(
−
)
15 RESERVED
(
−
)
16 RESERVED
(
−
)
17 RESERVED
(
−
)
18 RESERVED
(
−
)
19
EMO STATUS (
−
)
20
PUMP N2 WARNING STATUS (
−
)
21 RESERVED
(
−
)
22 RESERVED
(
−
)
23
BACK PRESSURE HIGH WARNING STATUS (
−
) *1
24 RESERVED
(
−
)
25 RESERVED
(
−
)
*1 As
optional
*2
It can change to “Abnormality
：
OPEN, Alternate
“
by DIP SW. setting.
1
25 14
Screw lock size : M2.6
Contact pin surface : Au
13