(
7)
EBARA
Corporation
3.4 Detailed Specifications
The following tables and figures should be consulted for pump specification,
dimension and performance details.
Table 3.1 Specification
Model
Model ESA70W
Model ESA70WN
Pumping Speed(50/60Hz)
7000/8400 L/min
Ultimate Pressure(50/60Hz)
0.27 / 0.13Pa
0.4 / 0.27Pa
Gas Inlet
NW50
Connection
Gas Outlet
NW40
Motor
2P 2.2kW + 2P 3.7kW
Connection
Coupler (Rc 3/8)
Pressure
Supply
: Max. 0.4Mpa
[Gauge Press.]
Differential Press.
: Min. 0.1Mpa
Flow rate
3.5 - 8 L/min
Cooling
Water
Temperature
Max. 30 deg C
Connection
1/4” Tube Fitting (Same as Swagelock or equivalent)
Pressure
Supply : 0.1-0.7Mpa
[Gauge Press.]
[Setting : 0.04-0.07Mpa]
Approx. Flow rate*
24
～
27 Pam
3
/s
N2
Gas
[N
2
-0 Mode]
[4.7 Pam
3
/s]
Duct Connection
d50 mm
×
L50 mm
Venti-
Approx. Flow rate
0.5 m
3
/min
Utility
lation Pressure
-196
Pa
Lubrication
Oil
Brand
BARRIERTA J100ES
BARRIERTA J100
(NOK)
(NOK)
Quantity
0.8
L
Approx. Weight
380kg
Phase/Volt/Freq
3 Phase , 200V (50Hz), 200-220(60Hz)
Current Rating
29.5A
Japan Avitation Electronics Industry Co.,Ltd.
Power
Connection
JL04HV-2E22-22PE-B
Control Signal
D-sub 15Pin + D-sub 25Pin
[Note] * The ambient temperature of the pump installation place shall be 30 degrees
centigrade of lower.