(30)
EBARA
Corporation
Fig. 6.3 How to set the operational mode
SET
CONTROL MODE?
SET
DIP SW?
SET POINT
BACK PRESSURE
？
▼
▲
BP : ##.# A
MP : ##.# A
PRG.
Press the
for 3 sec.
or more.
▼
▲
• Status display
• Setting the pump operation control mode
• Setting the DIP switch
• Setting the WARNING value for the back
Pressing the key PRG. for 3 sec. or more
when the status screen is displayed switches
to the operational mode setting screen.
When the mode you want to
set is displayed, press the
ENTER to go to the setting
change screen.
SET POINT
PUMP N2 WARNING
？
▼
▲
• Setting the N
2
flow low point.
▼