FPG8601™/VLPC™ OPERATION AND MAINTENANCE MANUAL
© 2007 DH Instruments, a Fluke Company
Page 60
Table 12. <DUT Manifold> Display
LABEL
DESCRIPTION
Ion Gauge
The pressure and degas state of the ion gauge display in this field. The red/green
indicator is available when zeroing. This indicator is changed to green after the ion gauge
has successfully completed degassing.
Turbo Pump
The rotation speed and current of the manifold vacuum pump display in this field.
Zero DUT
Manifold
Executes the manifold zero process (see Section 5.6). The manifold is isolated from the
FPG and subjected to a hard vacuum. This feature is intended to be used with devices
that must be zeroed in low absolute conditions.
Degas Ion Gauge
Toggles the state of the ion gauge degas option. When the ion gauge pressure is low
enough (approximately 6 MPa) degassing can be turned on. If the pressure is above this
limit, the ion gauge automatically turns off degassing. The ion gauge automatically turns
of degassing when the process is complete.
Vent Vacuum
Pump
Vents the vacuum pump by opening the pump’s vent valve for 2s every 10s for 30s.
This prevents a large flow of air on the turbo pump. If the pump is spinning at high
speeds, a large rush of air can damage the pump over time.
Turn On/Off Ion
Gauge
Turns on or off the ion gauge. The manifold vacuum should be on and spinning at
approximately 63 krpm before attempting to turn the pump on. The ion gauge must be
active in the system setup and powered on for this option to be available.
Turn On/Off
Vacuum Pump
Turns on or off the vacuum pump. It is best to vent the pump when it is turned off.
The turbine inside the vacuum pump will spin for several hours if not vented. The
manifold vacuum isolation valve (13) is not toggled when this option is used.
6.4
TOOLBARS
There are three main toolbars used by FPG Tools: the window display toolbar, valve control toolbar and
the function toolbar. The window display toolbar is used to display any of the various program
run screens. This is the smallest of the three toolbars and is available at all times. The other toolbars are
only available when FPG Tools is in a run mode (see Section 6.5). The valve control toolbar is available
only when FPG Tools is executed in the Diagnostics user level (see Section 6.10).
6.4.1
WINDOW DISPLAY TOOLBAR
This toolbar is used to display any of the various FPG run screens. When a toolbar item is
selected, the corresponding run screen displays in the last stored position. This could be
outside the display area of the main program. As a result, it may be necessary to scroll the
main display to view the selected run screen.
Figure 26.
Window Display Toolbar
