1. Pre-Operation
1. Pre-Operation
1-3
１章
運転準備
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ON0001
OM0001
1.2
All origin return screen
Explanation on all origin return screen.
①
: Current date and time display
②
: Current product type name, frame name and wafer name display.
③
All origin return cancel button
When selected: Fine adjustment screen will be displayed.
④
All origin return execute button
When selected: All origin return will be executed
⑤
Unit status display
Display status of unit origin return (left icon show origin return in
progress)
①
②
③
④
⑤
⑦
⑧
⑨
⑩
