Description of the Load Lock operation
mode:
l
LL Mode = Off
u
The mode « Load Lock » is de-activated, the module DP and the
module MB, when present, operate constantly at their maximum
frequency of rotation.
NOTE:
the parameters « DP (or MB) Current Level », « Time
Before » and « DP Idle » are idle.
CAUTION
LL Mode = Off is not recommended for Load Lock cyclic pumping due
to the current load and the mechanical stress with full speed.
l
LL Mode = Auto
u
The mode Load Lock is activated and de-activated according to
the current load taken in by the module DP (or MB). The current
threshold is adjustable using the parameters « DP/MB Current
Level ». When the current level exceeds the threshold, the
modules DP and MB accelerate to their maximum frequency of
rotation. When the current level drops below the threshold, a time
delay which is adjustable in its duration using the parameter
« Time Before », will start. As soon as the time
delay's duration has elapsed, the modules DP and MB slow down
to their minimum frequency of rotation.
NOTE:
-
If the parameter « DP Idle » is configured to « Disable », the
module DP runs constantly at maximum frequency of rotation.
-
If the module is not controlled by a frequency inverter, module MB is
started if the current level exceeds the threshold and is stopped if the
current level drops below the threshold and if the time delay's duration
has elapsed.
l
LL Mode = External
u
The Load Lock mode is activated and de-activated depending on
the digital input status « Remote Process On » which is available
on the tool interface. When the input changes to status 1, the
modules DP and MB accelerate to their maximum frequency of
rotation. When the input changes to status 0, the modules DP and
MB slow down to their minimum frequency of rotation.
NOTE:
- When the parameter « DP Idle » is configured to « Disable », the
module DP runs constantly at the maximum frequency of rotation.
- The parameters « DP (or MB) Current Level » and « Time Before » are
idle.
- Refer to chapter « Description of MENU 08 TOOL INTERFACE » for
the configuration of the input « Remote Process On ».
- If the module MB is not controlled by a frequency inverter, module
MB is started if the input changes to status 1 and is stopped if the input
changes to status 0.
CAUTION
The mode « Load Lock » will not work when:
- The warming up cycle has not finished.
- The mode maintenance is activated.
CAUTION
- Be careful to set « Current level » and « Time Before » parameters re-
garding process cycle time and chamber size to be sure module MB is
stopped or running idle speed before opening inlet valve.
- Be careful to change input status to 0 before opening inlet valve.
COBRA DS 8163 A
Installation and start-up
0870772605
Page 23
Summary of Contents for COBRA DS 8163 A
Page 34: ......
