Current control mode (Select LL mode = AUTO)
Standard DP current level
DP current level
40 A (200V)
20 A (400V)
Time Before
40 sec
** it depends on the process time, chamber capacity and end vacuum level
Standard setting (time)
1) Cold start
900 sec
2) MB on delay
30 sec
COBRA DS 8163 A
Standard operational time chart
0870772605
Page 25
Pump speed
Booster
Dry pump
Pump ready
(pump
ĺ
tool)
Chamber open/close
(gate valve on/off)
1) Cold start
2) MB on delay
60Hz
15Hz
delay (5 sec)
50/60Hz
pump start-up
processing
pump stop
open(on)
close(off) open(on)
close(off) open(on)
close(off)
DP Current
35 A
5 A
delay (5 sec)
Time before (40 sec)
DP current level 20 A
LCD start or
Remote start
(tool
ĺ
pump)
Summary of Contents for COBRA DS 8163 A
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