COBRA NS vacuum pump
WY rotary lobes vacuum pump
Noise emission
Refer to the table “Technical data” for the permissible noise level in
free field conditions according to EN ISO 2151.
CAUTION
The intensity of the noise of the vacuum system is higher within a
certain area of the vacuum system.
Risk of hearing damage.
Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum system.
Maintenance clearance
Before any maintenance action, ensure a maintenance clearance
around the vacuum system of min. 610 [mm].
Electrical safety
Types of Electrical Work
The following are the four types of electrical work defined by the SEMI
S2, latest version, guideline:
Type 1
Equipment is fully deenergized.
Type 2
Equipment is energized. Energized circuits are covered or insulated.
NOTE
: Type 2 work includes tasks where the energized circuits are or
can be measured by placing probes through suitable openings in the
covers or insulators.
Type 3
Equipment is energized. Energized circuits are exposed and inadvertent
contact with uninsulated energized parts is possible. Potential expo-
Safety
COBRA DS 8163 A
Page 12
0870772605
Hot surface
Do not touch
Oil filler plug (OFP)
Oil drain plug (ODP)
Oil sight glass (OSG3)
Oil sight glass (OSG5)
Oil sight glass (OSG4)
Hot surface
Do not touch
Oil filler plug (OFP)
Hot surface
Do not touch
Oil drain plug (ODP)
Oil sight glass (OSG3)
Oil sight glass (OSG4)
Oil sight glass (OSG5)
WARNING
WARNING
WARNING
Filling in oil (OFP)
Oil sight glass (OSG2)
WARNING
Hot surface
Do not touch
WARNING
Hot surface
Do not touch
Filling in
cooling liquid (CLF)
Draining in
cooling liquid (CLD)
Filling in oil (OFP)
Oil sight glass (OSG1)
Hot surface
Do not touch
Purge, cooling
liquid (CLV)
Filling in oil (OFP)
Purge, cooling
liquid (CLV2)
Purge, cooling
liquid (CLV1)
Filling in
cooling liquid (CLF)
WARNING
Summary of Contents for COBRA DS 8163 A
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