Product description
Use
The vacuum sytems COBRA DS are designed for use in the field of mi-
croelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the vacuum system corresponds in design to applicable local
and national safety regulations and that all applicable safety mea-
sures are followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum system. Procedural errors
can result in the vacuum system sucking in a certain quantity of liquid.
If the vacuum system has sucked in liquid, a short drying time is neces-
sary at the end of the procedure.
The allowed maximum inlet gas temperature depends on the inlet pres-
sure and the type of gas: the lower the inlet pressure (Pa), the higher
the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum system is intended for use in a potentially non-explosive
environment.
Max. permissible number of startings per hour: 6.
As far as temperature is concerned, the vacuum system is suitable for
continuous duty at any pressure between atmosphere and ultimate
pressure.
The vacuum system is tight down to ultimate pressure.
Operating principle
The vacuum sytems COBRA DS standard version is a combination of
one or more COBRA NS (DP 600) vacuum pumps with cooling water
and nitrogen circuits and one or more WY (MB) rotary lobes vacuum
pumps with a frequency inverter.
The gas conveying is done on two levels: one by the Roots WY
vacuum pump and the other by one or two COBRA NS 600 C vacuum
pumps working in parellel. The pressured gas is conveyed to the re-
spective silencers.
Principle of the screw vacuum pump DP
The COBRA NS vacuum pumps work by the principle of screw pumps.
Two parallel screws (7) rotate in opposite directions in the pump body.
Entering gases are trapped between the flights of the screws and the
pump body. The gases are conveyed by the rotation of the screws to
the exhaust, where they are discharged.
The COBRA NS vacuum pumps are driven by water-cooled motors.
Principle of the lobe vacuum pump Roots MB
The WY rotary lobes vacuum pumps operate according to the ap-
proved principle of the Roots type machine. Operation is both simple
and effective. Two lobes rotors (11) with identical profiles rotate in op-
posite directions within a casing. As they rotate, gas is drawn into the
space between each rotor and the casing where it is trapped and by
the rotation pushed out into the discharge. This action is repeated
twice for each revolution of each rotor and therefore four times for
each revolution of the drive shaft. There is no mechanical contact be-
tween rotors and cylinder. So no oil lubrication is required.
The WY rotary lobes vacuum pumps are driven by water-cooled mo-
tors.
Principle of the vacuum system COBRA DS
–
1) Start DP: During start-up, the COBRA NS (DP 600) starts first. If
there are several pumps NS, DP1 starts first and then DP2 and DP3
starts after the delay of the timer“DP2 ON DELAY” is done (timer
settable in the settings, normally at 1s).
–
2) Start MB: The WY Roots pump will starts after the DP1 when
the delay of the timer “MB ON DELAY” is done (timer settable in
COBRA DS 8163 A
Product description
0870772605
Page 9
1
6
6
3
9
8
5
7
3
4
2
10
6
5
12
14
1
Inlet
2
Discharge
3
Oil
4
Cooling water
5
Barrier gas
6
Cooling liquid
7
Screw rotors
8
Dilution gas (dil 2)
9
Dilution gas (dil 1)
10 Temperature sensor
11 Lobe rotors
12 DP motor & motor klixon
13 MB motor & motor klixon
14 Oil distribution pipe
Summary of Contents for COBRA DS 8163 A
Page 34: ......
