Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
1-3
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
Leak Integrity
Inboard to Outboard: 1x10
-10
atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 60°C (32°F to 140°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Maximum Fluid Operating Temperature
0°C to 65°C (32°F to 149°F)
PHYSICAL:
Materials of Construction (SLA6900 Series)
316L Vacuum Arc Remelt (VAR), 316L, and high-alloy ferritic stainless steel.
External/internal seals: Nickel
Valve seat: 316L stainless steel - standard
Internal wetted surface finish 5 Ra
Materials of Construction (SLA6800 Series)
316L Vacuum Arc Remelt (VAR), 316L, and high-alloy ferritic stainless steel.
External/internal seals: Nickel
Valve seat: 316L stainless steel - standard
Internal Wetted Surface Finish: 32 Ra
Outline Dimensions
Refer to Figures 2-9.
Process Connections (SLA6900 Series)
1/4" male VCR
TM
CS Seal (SEMI spec. 2787.5 4/98)
C Seal (SEMI spec. 2787.1 4/98)
Process Connections (SLA6800 Series)
1/4" male VCR
TM
CS Seal (SEMI spec. 2787.5 4/98)
C Seal (SEMI spec. 2787.1 4/98)
ELECTRICAL CHARACTERISTICS:
Electrical Connections
Analog I/O option: 15-pin D-Connector, male
DeviceNet I/O option: 5-pin Micro-Connector, male
EMC Directive 89/336/EC
per 61326
Power Supply Voltage
Analog I/O option: +15 Vdc, ±5%
(traditional -15 Vdc pin is ignored)
DeviceNet I/O option: nominal = 11-25 Vdc
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