Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
3-2
Section 3 Operation
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
3-3 Features
Note: All SLA6950/SLA6850 Series mass flow controllers and SLA6960/
SLA6860 Series mass flow meters are configured at the factory according to
customer order and do not require adjustment. Not all features are available
on all instruments.
The SLA6950/SLA6850 Series is a full-featured digital MFC. The SLA6950/
SLA6850 Series performs much like a traditional analog MFC, but with
improved accuracy, step response and valve control. The analog interface
matches that of Brooks' popular analog MFCs so the SLA6950/SLA6850
Series can be retrofitted into tools using analog MFCs. Other versions of the
SLA6950/SLA6850 Series can provide a variety of digital protocols, for
example DeviceNet.
The SLA6950/SLA6850 Series is capable of storing up to 10 different sets of
gas calibration data. Each set includes a calibration curve, PID controller
settings, valve performance data, and information about the calibration
conditions. The SLA6950/SLA6850 Series can contain calibrations for
different gases or for the same gas at multiple conditions (pressures, full-
scale flow rates). Section 3-5 Analog Mode of Operation describes more
information about the data contained in the calibration table and how to
access the data.
Calibrations will appear in the calibration table in the same order as they
appeared on the SLA6950/SLA6850 Series customer order, unless otherwise
specified. The first listed gas will appear as calibration #1 the second as
calibration #2 and so on. Note that unless specified otherwise on the
Figure 3-1 Flow Sensor Operational Diagram (VCR
TM
End Connections Shown)
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