Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-TMF-eng
Part Number: 541B100AAG
August, 2009
4-2
Section 4 Maintenance
& Troubleshooting
4-2 Troubleshooting
This section contains suggestions to help diagnose MFC/MFM related
problems in the gas distribution system and answers commonly asked
questions.
Brooks PN# S273Z668AAA breakout kit can be used as an accessory for
diagnosing electrical problems.
a. Problem: Flow/flow signal doesn’t reach setpoint. (MFC Only)
Failure of the flow rate or flow signal to achieve the setpoint could be caused
by a number of factors:
1. Insufficient pressure drop across the SLA6950/SLA6850 MFC (low or no
pressure). If there is not enough pressure differential across the MFC, it is
impossible for the MFC’s valve orifice to pass the full scale flow rate. To
check for this condition, compare the actual inlet/outlet pressure drop with
that specified on the order. Increase the pressure if necessary.
2. Setpoint is below minimum. MFCs with metal seats may have a
leak-through rate of up to 3% of full scale. These instruments are not
guaranteed to operate below setpoints of 3.3% FS.
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