Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM'
s
2-4
Section 2 Installation
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve (MFC). The filtering element should
be replaced periodically or ultrasonically cleaned.
Table 2-1. Recommended Filter Size.
Maximum Flow Rate
Recommended Filter
100 sccm
1 micron
500 sccm
2 microns
1 to 5 slpm
7 microns
10 to 30 slpm
15 microns
2-9 Electrical Interface
The SLA6900/SLA6800 Series MFM's are controlled using analog 0-5 Vdc
signals. The minimum set of connections which must be made to the Model
SLA6950/SLA6850 MFC and Model SLA6960/SLA6860 MFM i15
Vdc, supply common, and a setpoint signal. The setpoint signal is supplied as
a
0 to 5 Vdc analog signal. All signals are supplied via the 15-pin ‘D’ connector.
The SLA6900/SLA6800 Series MFM's electrical interface is designed to
facilitate low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply.
These commons are electrically connected together on the SLA6900/
SLA6800 Series MFM's PC board.
Voltage I/O Version
• Chassis Ground
• Signal Common
• Signal Output
• +15 Vdc Supply
• -15 Vdc Supply (not used by SLA6950 MFC)
• Setpoint Input
• Setpoint Common
• Supply Common
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