Brooks Instrument SLA6800 Series, Installation And Operation Manual

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Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's
Installation and Operation Manual
X-TMF-SLA6900-SLA6800-TMF-eng
Part Number: 541B100AAG
August, 2009
4-12
Section 4 Maintenance
& Troubleshooting
GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m
3
)
FACTOR FACTOR @0°C, 1 atm
Ethylene C
2
H
4
0.619 1.000 1.261
Ethylene Oxide C
2
H
4
O 0.589 1.254 1.965
Fluorine F
2
0.924 1.163 1.695
Fluoroform f-23 CHF
3
0.529 1.584 3.127
Germane GeH
4
0.649 1.653 3.418
Germanium Tetrachloride GeCl
4
0.268 2.766 9.574
Halothane (R-123B1) C
2
HBrClF
3
0.257 2.654 8.814
Helium He 1.386 0.378 0.178
Hexafluoroacetone F
3
CCOCF
3
0.219 2.434 7.414
Hexaflorobenzine C
6
F
6
0.632 2.577 8.309
Hexafluoroethane f-116 C
2
F
6
0.255 2.219 6.139
Hexafuoropropylene (HFP) C
3
F
6
0.249 2.312 6.663
Hexamethyldisilane (HMDS) (CH
2
)
6
Si
2
0.139 2.404 7.208
Hexane C
6
H
14
0.204 1.757 3.847
Hydrogen H
2
1.008 0.269 0.090
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H
2
Se 0.837 1.695 3.613
Hydrogen Sulfide H
2
S 0.850 1.108 1.539
Iodine Pentafluoride IF
5
0.283 2.819 9.907
Isobutane C
4
H
10
0.260 1.440 2.593
Isobutene C
4
H
8
0.289 1.435 2.503
Isopentane C
5
H
12
0.211 1.605 3.222
Krypton Kr 1.382 1.729 3.708
Methane CH
4
0.763 0.763 0.717
Methylacetylene C
3
H
4
0.473 1.196 1.782
Methyl Bromide CH
3
Br 0.646 1.834 4.236
3-Methyl-1-butene C
5
H
10
0.252 1.584 3.127
Methyl Chloride CH
3
CL 0.687 1.347 2.308
Methyl Fluoride CH
3
F 0.761 1.102 1.518
Methyl Mercaptan CH
4
S 0.588 1.313 2.146
Methyl Silane CH
6
Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH
3
Cl
3
Si 0.267 2.310 6.675
Methyl Vinyl Ether C
3
H
6
O 0.377 1.435 2.567
Monoethanolamine C
2
H
7
NO 0.305 1.477 2.728
Monoethylamine C
2
HH
5
NH
2
0.359 1.269 2.013
Monomethylamine CH
3
NH
2
0.565 1.067 1.420
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
4
0.212 2.371 7.008
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
2
1.000 1.000 1.251
Nitrogen Dioxide NO
2
0.758 1.713 2.052
Nitrogen Trifluoride NF
3
0.501 1.598 3.168
Nitrogen Trioxide N
2
O
3
0.443 1.649 3.389
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N
2
O 0.752 1.259 1.964
Octofluorocyclobutane C
4
F
8
0.169 2.672 8.933
Oxygen O
2
0.988 1.067 1.429
Oxygen Difluoride OF
2
0.672 1.388 2.402
Ozone O
3
0.738 1.310 2.138
Pentafluorethane f-125 C
2
HF
5
0.287 2.070 5.360
Pentane (n-Pentane) C
5
H
12
0.212 1.605 3.222
Perchloryl Fluoride CLO
3
F 0.448 1.905 4.571
Perfluorobutane C
4
F
10
0.738 2.918 10.61
Perfluoro-2-Butene C
4
F
8
0.268 2.672 8.933
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Table 4-4 Conversion Factors (Nitrogen Base) Continued.
Ref. No. J-836D508 gasdata.doc Vsn. 8.6
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