4-1
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 4 Maintenance
4-1 General
No routine maintenance is required on the Model 5860E other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.
4-2 Troubleshooting
A. System Checks
The Model 5860E is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flowmeter for bench troubleshooting or return, especially if the
system is new:
N
B. Bench Troubleshooting
1. Properly connect the mass flowmeter to a ±15 Vdc power supply,
and connect an output signal readout device (4-1/2 digit voltmeter
recommended) to terminals 2 and 3 (D-type pins 2 and 10) (Refer to
Figure 2-2). Apply power, and allow the flowmeter to warm up for 45
minutes. Do not connect to a gas source at this time. Observe the
output signal and, if necessary perform the zero adjustment proce-
dure (Section 3-3). If the output signal will not zero properly, refer to
the sensor troubleshooting section and check the sensor. If the
sensor is electrically functional, the printed circuit board is defective
and will require replacement.
2. Connect the flowmeter to a source of the gas on which it was origi-
nally calibrated. Increase the flow until 100% indication (5.00Vdc) is
achieved. Vary the flow rate over the 2 to 100% range and verify that
the output signal follows the flow rate. If possible, connect a flow
measurement device in series with the mass flowmeter to observe
the actual flow behavior and verify the accuracy of the mass flowme-
ter. If the mass flowmeter functions as described above, it is func-
tioning properly and the problem may lie elsewhere.
