4-11
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 4 Maintenance
Table 4-4 Model 5860E Standard Restrictors
Range
Part Number*
sccm Air Equivalent Flow
Size
Low
High
Sintered
ACLFE
Wire Mesh
D
8.022
11.36
S110Z296
S110Z275
E
11.23
15.90
S110Z297
S110Z276
F
15.72
22.26
S110Z298
S110Z277
G
22.01
31.17
S110Z299
S110Z278
H
30.82
43.64
S110Z300
S110Z279
J
43.14
61.09
S110Z301
S110Z-280
K
60.40
85.53
S110Z302
S110Z281
L
84.56
119.7
S110Z303
S110Z282
M
118.4
167.6
S110Z304
S110Z283
N
165.7
234.7
S110Z305
S110Z284
P
232.0
328.6
S110Z306
S110Z285
Q
324.8
460.0
S110Z307
S110Z286
R
454.8
644.0
S110Z308
S110Z287
S
636.7
901.6
S110Z309
S110Z288
T
891.4
1262.
S110Z310
S110Z289
U
1248.
1767.
S110Z311
S110Z290
V
1747.
2474.
S110Z312
S110Z291
W
2446.
3464.
S110Z313
S110Z292
X
3424.
4849.
S110Z319
Y
4794.
6789.
S110Z321
1
6711.
9504.
S110Z317
2
9396.
13310.
S110Z228
3
13150.
18630.
S110Z226
4
18420.
30000.
S110Z224
*Materials: BMT = 316 Stainless Steel (ACLFE only)
BMA = Sintered 316 Stainless Steel (Wire Mesh and Sintered)
NOTE: For flow rates less than 8 sccm use the low flow plug, P/N 618K020BMT in place of a
restrictor assembly.
