5-3
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 5 Parts List
Item
No.
Qty.
Description
Part Number
1
1
Flowmeter Body
092Z773BM%
2
1
PC Board Assembly (D-Connector)
S097Y847AAA
3
1
Sensor Assembly
S774Z607AAA
4
2
O-ring, Sensor, Size 004
375B004***
5
2
Backup Ring, Sensor
962A027NZA
6
2
Screw Sensor Body
751Z107AA0
7
2
Lock Washer, Sensor
926D006AWA
8
5
Screw, Sensor PC Board Cover
753L056AWZ
9
1
Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)
10
1
O-ring, Restrictor, Size 109
375B109***
11
1
Electronics Cover Can (D-Connector)
219Z392EA%
12
1
Cover Plate
852Z213EA%
13
1
PC Board Mounting Bracket
079Z135EAA
14
2
Pot Hole Plug
620Z434SXA
Fittings:
1/4" Compression, Swagelok
320B136BMA
NS
2
1/4" Male VCR, Cajon
315Z036BMA
1/4" Male VCO, Cajon
315Z035BMA
15
2
O-ring, Fitting, Size 906
375B906***
NS
2
O-ring, VCO Gland, Size 010
375B010***
Interconnecting Cables:
Length:
D-type
Connector on one end
5 Feet
S124Z361AAA
with no termination
10 Feet
S124Z362AAA
NS
on other end
25 Feet
S124Z363AAA
1
50 Feet
S124Z435AAA
Connector on one end
5 Feet
S124Z576AAA
NS
with Connector for Model 5870
10 Feet
S124Z577AAA
Series Secondary
25 Feet
S124Z578AAA
Electronics on other end
50 Feet
S124Z579AAA
NS
2
8-32 Mounting Screw
Customer Supplied
***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown
Table 5-1 Model 5860E Replacement Parts List
Model 5850 Service Tool Kit
Model 5850 Break Out Board Assembly
P/N S778D017AAA
P/N S273Z668AAA
Permits the complete disassembly of the
Installs directly between mass flow sensor/
Model 5850E for servicing.
controller and interconnecting cable. Allows
convenient access to all signals for easy
Contains:
troubleshooting of system.
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool
1 - Break Out PC Board
1 - Ball Point Allen Wrench
1 - 5 foot Extension Cable
1 - Phillips Screw Driver
1 - Terminal PC Board
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver
Table 5-2 Tool and Spare Part Kits for Model 5860E
