1-2
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 1 Introduction
1-3 Specifications
Flow Ranges
Any full scale flowrate from 3 sccm to 30 slpm, N
2
*
Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials Institute) standard: 0° C and
101.3 kPa (760 Torr).
Ratings
Maximum Operating pressure: 4500 psi (31.03 MPa)
Ambient/Operating Temperature: 40°F to 150°F (5°C to 65°C)
Non-Operating:-13°F to +212°F (-25°C to 100°C)
Performance
Accuracy: ±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability
0.25% of rate
Figure 1-1 Typical Response to Flow Step Changes
