2-2
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 2 Installation
2-3 Return Shipment
Prior to returning any Brooks equipment to the factory, contact the factory -
for a Return Materials Authorization Number (RMA#). This can be obtained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569).
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-mail: [email protected]
www.BrooksInstrument.com
Brooks Instrument
Brooks Instrument
Neonstraat 3
1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands
Tokyo, 136-0073 Japan
P.O. Box 428
Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands
Fax 011-81-3-5633-7101
Tel 31-318-549-300
Email: [email protected]
Fax 31-318-549-309
E-mail: [email protected]
Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.
2-4 Gas Connections
Standard inlet and outlet connections supplied on the Model 5860E are 1/
4" compression fittings for flow rates up to 10 slpm, and 3/8" compression
fittings for higher flow rates.
Optional VCO
TM
and VCR
TM
connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.
2-5 Installation (Refer to Figures 2-1 through 2-2)
