4-4
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 4 Maintenance
4-3 Sensor Tube
The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly. If the sensor assembly is cleaned and reinstalled, a calibration
check should be performed. Refer to Section 3-4.
4-4 Disassembly and Assembly
Note: The Model 5860E Mass Flow Meter may be disassembled and
assembled in in the field by the user for cleaning, reranging or servicing.
Disassemble and reassembly the meter as follows:
A. Disassembly
The numbers in () refer to the spare parts exploded view in Figure 5-1.
Do not attempt to disassemble the mass flowmeter until pressure
has been removed and purging has been performed. Hazardous
gas may be trapped in the valve assembly which could result in
explosion, fire, or serious injury.
1. Remove the three screws (8) attaching the electronics cover and
loosen the upper jack post on the D-Connector. Remove the elec-
tronics cover (11).
Be careful not to stress the sensor lead wire to sensor assembly
junction when removing the sensor connector from the PC board.
If the sensor lead wires are stressed an open in the sensor wiring
could result.
2. Unplug the sensor connector from the PC Board. Remove the two
screws securing the bracket (13) and PC Board (2). Remove the
bracket and PC Board.
3. Remove the two screws (6) and washers (7) securing the sensor
assembly (3). Remove the sensor assembly.
Note: Do not attempt to disassemble the sensor assembly.
Do not scratch the O-ring sealing surface.
4. Remove the backup rings (5) and the sensor assembly O-rings (4)
from the flowmeter body (1). Using the Brooks O-ring removal tool
will help prevent scratching the sealing surface.
5. Remove the adapter fittings (15) from the flowmeter body (1).
6. Remove the restrictor assembly (9) from the inlet side of the flowme-
ter body (1) using the restrictor tool (part of service tool kit listed in
Section 5, Table 5-2).
