ii
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Contents
Figures
Figure
Page
Number
Number
1-1
Typical Response to Flow Step Changes ........................... 1-2
2-1
Model 5860E Dimensions .................................................. 2-3
2-2
"D" Type Connector Pin Arrangement ................................ 2-3
3-1
Flow Sensor Operational Diagram ..................................... 3-2
3-2
Model 5860E Calibration Connections ............................... 3-4
3-3
Adjustment Potentiometer Location ................................... 3-4
3-4
Fast Response Adjustment ................................................ 3-4
5-1
Model 5860E Parts Drawing .............................................. 5-2
Tables
Table
Page
Number
Number
2-1
Recommended Filter Size ................................................. 2-4
4-1
Bench Troubleshooting ...................................................... 4-2
4-2
Sensor Troubleshooting ..................................................... 4-2
4-3
Conversion Factors (Nitrogen Base) .................................. 4-7
4-4
Model 5860E Standard Restrictors .................................... 4-11
5-1
Model 5860E Replacement Parts List ................................ 5-3
5-2
Tool and Spare Part Kits for 5860E .................................... 5-3
