STP-H803/H1303 Series Instruction Manual
5.3
Baking the STP Pump
Installation
To attain a less pressure in a shorter time and reduce the exhaust time, bake the
vacuum equipment and STP pump.
◇
The surfaces of the STP pump and its peripheral equipment will
become extremely hot when performing baking. NEVER touch them
with bare hands.
◇
The TMS unit and the baking heater cannot be used together at the
same time.
◇
When baking the STP pump, always cool it to prevent overheating.
◇
Start baking after cooling is started.
Set the temperature of the baking heater to 120
°
C or less.
◇
DO NOT pump gases during baking to prevent overheating.
◇
To exhaust the gas discharged from the vacuum equipment and the
inner wall of the STP pump, run the STP pump during baking.
5.3.1
Attaching a Baking Heater
1)
Install the backing heater (special accessory) near the inlet port flange in
the perimeter of the envelope.
2)
Affix the hot surface warning label attached on the surface of the pump seen
well. (See Figure 5.1, "Attaching Positions of the Cooling Unit and Backing
Heater")
◇
Check the rated voltage of the baking heater before use. (The range
of the available voltage of the backing heater (special accessory) is
display voltage
±
10%.)
◇
Wind the baking heater around the surface of the STP pump tightly.
If the baking heater is not wound tightly, the loose parts will overheat.
◇
Procure protective parts for the baking heater, such as an earth
leakage breaker or fuses when using the baking heater.
◇
DO NOT apply excessive force to the cable for the baking heater.
5-3
