STP-H803/H1303 Series Instruction Manual
11.6.3 Overhaul
The recommended maintenance intervals for different process applications are
tabulated below:
Process Period
Remarks
Metal Etch
1 year
Ensure that TMS (Temperature Management
System) is fitted and operational to prevent
accumulation of by-product deposition in the pump.
Other Etch
Processes
2 years
Etching
*1
It is recommended to change the pump rotor after 5 years due to accumulated wear of the
protective plating material
Other semiconductor
process
2 years
Processes resulting in accumulation of deposits in
the pump will require more frequent service.
Clean applications
(Only vacuum pumping)
5 years
Other use
(2 years)
Dependent on application, contact BOC Edwards.
◇
The touch down bearing inside the STP pump will be worn out after a
number of full speed touchdowns. When the STP control unit
displays "w," it is essential to have the touch down bearings
replaced.
Troubleshooting
The costs of replacing parts that need to be replaced because of deterioration or
abrasion will be at your own charge.
When overhaul of the STP pump or the STP control unit is needed, contact
Service office.
*1
"Etching" includes semiconductor etching and LCD etching.
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