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BOC Edwards Seiko Seiki STPH1303C, Instruction Manual

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STP-H803/H1303 Series Instruction Manual 

5 

Gas Pumping, Cooling and Baking the STP Pump   

Installation

 

5.1 Gas 

Pumping 

 

◇ 

When pumping gases, they may remain in the STP pump.    Introduce 
a purge gas and then exhaust all gasses.     
Residual gases in the STP pump may cause an accident when the 
STP pump is removed. 
Confirm the characteristics of gases to be used, referring to the 
Material Safety Data Sheet (MSDS) you obtain from the gas supplier. 

 

 

◇ 

The STP series models are chemical specific pumps; chlorine or 
fluorine system gases can be used with these models.    When you 
use gases including alkaline metals, but excluding Li, gases 
including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.   

◇ 

Cool the STP pump to prevent the STP pump from overheating when 
pumping gases 

 

5.1.1 

How to Introduce a Purge Gas 

 

◇ 

When pumping reactive or corrosive gases, introduce a purge gas to 
protect the inside of the STP pump.    Doing so may result in product 
damage. 

 

Connect a needle valve or a similar part to the purge port and introduce a dry N

2

 

gas or other gas to perform a gas purge (See Section 4.3.5, "Connecting the Purge 
Port"). 

 

◇ 

The proper amount of the gas purge is approx. 3.4

×

10 

-2

 Pa·m

3

/sec 

(20SCCM). 

◇ 

The allowable gas pressure ranges from zero [atmospheric pressure] 
to 4.9

×

10

4

Pa [gauge pressure] (zero [atmospheric pressure] to 0.5 

kgf/cm

2

 [gauge pressure]). 

◇ 

High-pressure at the inlet port may result in a noise.    This is no 
abnormality/error. 

 

5-1

Summary of Contents for Seiko Seiki STPH1303C

Page 1: ... Crawley West Sussex RH10 2LW UK Telephone 44 0 1293 528844 Fax 44 0 1293 533453 http www bocedwards com Instruction Manual Seiko Seiki STPH803C H1303C H803CI P033 Turbomolecular Pump System Document number MT 33E 002 F MT 33E 0A1 C ...

Page 2: ...All rights reserved Printed in Japan STP H803 H1303 Series Turbomolecular Pump Second Edition f INSTRUCTION MANUAL Read through the Safety Precautions and each section of this Manual carefully before using the STP pump Keep this Manual in a place where you can quickly access it at any time ...

Page 3: ...SYMBOLS The following symbols are used in this manual Death or Serious Personal Injury Failure to follow the guidelines marked with this symbol may result in death or serious personal injury Minor Personal Injury Product and or Peripheral equipment Damage Failure to follow the guidelines marked with this symbol may result in minor personal injury product and or peripheral equipment damage NOTICE I...

Page 4: ...xplosive combustible toxic corrosive etc And keep MSDS and a safety advice of gas supplier Warn of the danger of the gas with the warning label when the use gas is hazardous chemical materials Always execute gas purge in the pump with the inert gas and then exhaust residual gases thoroughly from the STP pump when removing the STP pump from the vacuum equipment Secure safety by wearing personal pro...

Page 5: ...enance such as replacement of fuses Perform inspections such as deposit and or the air cooling fan or Perform investigations into probable causes and action measures taken in the event of occurrence of a problem Do not perform the insulation test insulation resistance test and withstand voltage test to the STP control unit and STP pump When performing the insulation test to your equipment turn OFF...

Page 6: ... different serial numbers an error message is indicated when they are used without tuning And the tuning is necessary when the length of the STP connection cable is changed They may not function normally when they are used without tuning Once tuning is completed re tuning is not required unless the configuration the STP pump serial number the STP control unit serial number and the STP connection c...

Page 7: ...y result in product damage Perform investigations into probable causes and remove them before restarting the STP pump in the event of the occurrence of a problem The use of the abnormal STP pump may result in product damage DO NOT move the STP pump and the STP control unit while the STP pump is in operation Doing so may result in product damage 5 ...

Page 8: ...Specification STP H803C High throughput type chemical specific 1 STP H803CV High throughput type chemical specific TMS unit 2 attached STP H1303C High throughput type chemical specific STP H1303CV High throughput type chemical specific TMS unit attached For the specifications of other models of the STP H803 H1303 pump series contact BOC Edwards In this manual the above STP H803 H1303 pump series i...

Page 9: ...eral Requirements PRECAUTIONS 1 No part of this manual may be reproduced in any form by any means without prior written permission from BOC Edwards 2 BOC Edwards pursues a policy of continuing improvement in design and performance of this product The right is therefore reserved to vary specifications and design without notice Understand that the product you purchased and its contents including spe...

Page 10: ...ation or maintenance other than that specified herein 2 Failure to follow any of the warnings or cautions enumerated under or 3 Installation operation or maintenance using parts which are not specified by BOC Edwards 4 Maintenance personnel other than those authorized by BOC Edwards or Service office have disassembled reconditioned or tampered the product 5 Defect resulting from the not specified ...

Page 11: ...its of the use 14 Any direct incidental or consequential damage resulting from the use of the product 15 When continuously operated without overhaul after the WARNING indication WARNING message on the LCD display 16 Overhaul and replacement of maintenance parts 4 SPARE PARTS Fuse and air cooling fan for control unit Touch down bearing Heater ...

Page 12: ...vironment 4 3 4 2 2 Installation Area 4 4 4 2 3 Bench 4 4 4 3 How to Install the STP Pump 4 6 4 3 1 Cleaning the Seal 4 7 4 3 2 STP Pump Installation Positions 4 8 4 3 3 How to Secure the STP Pump 4 9 4 3 4 Vacuum Piping 4 13 4 3 5 Connecting the Purge Port 4 15 5 Gas Pumping Cooling and Baking the STP Pump 5 1 5 1 Gas Pumping 5 1 5 1 1 How to Introduce a Purge Gas 5 1 5 2 Cooling the STP Pump 5 2...

Page 13: ...er a Safety Function Operates 7 6 7 6 Operating the TMS Unit For use with the TMS unit only 7 7 7 6 1 Starting Stopping 7 7 7 6 2 Temperature Control 7 7 8 Remote Input Output Signal Connector 8 1 8 1 Input Signal Pins 8 1 8 2 Output Signal Pins 8 4 9 Adjustment Methods 9 1 9 1 Tuning 9 1 9 1 1 Tuning Method 9 1 9 1 2 Each of data after tuning 9 2 9 2 Confirmation Mode 9 4 9 3 Parameter Set Mode 9...

Page 14: ...Display Function 11 11 11 6 Maintenance and Inspection 11 12 11 6 1 Cleaning and Decontamination 11 13 11 6 2 Inspecting the Deposit 11 14 11 6 3 Overhaul 11 15 11 6 4 Transporting for Repair or Overhaul 11 16 12 Storage and Disposal 12 1 12 1 Storage of the STP Pump 12 1 12 2 Storage of the STP Control Unit 12 1 12 3 Disposal 12 2 13 Specifications 13 1 13 1 Specifications for the STP Pump 13 1 1...

Page 15: ...7 Output Signal Pins 8 4 Table 8 3 Rated Contacts for Relays CR1 to CR8 8 7 Table 9 1 Data List 9 2 Table 10 1 States of Lamps and REMOTE Output Signals at a Power Failure 10 2 Table 10 2 Operations of the STP Pump after a Power Recovery 10 2 Table 10 3 Safety Functions 10 6 Table 10 4 Safety Functions When the TMS Unit is Used 10 8 Table 11 1 Error Messages 11 3 Table 11 2 Troubleshooting after P...

Page 16: ... Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater 5 4 Figure 6 1 STP Control Unit Front Panel 6 3 Figure 6 2 STP Control Unit Rear Panel 6 5 Figure 6 3 Peripheral Space of the STP Control Unit 6 7 Figure 6 4 Example of Securing the STP Control Unit 6 8 Figure 6 5 External Dimensions of Each Cable 6 9 Figure 6 6 External Dimensions of Each Cable 6 10 Figure 7 1 STP Pump Operatio...

Page 17: ...ases to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier And keep MSDS and a safety advice of gas supplier CAUTION Introduce a dry N2 gas purge gas to protect the inside of the STP pump when using reactive or corrosive The use of reactive or corrosive gas may result in product damage Cool the STP pump to prevent the STP pump from overheating when pumping ga...

Page 18: ...Unit Caution Label This label describes precautions for operating the STP control unit Follow these precautions ポンプとコントロールユニッ トを異なるNoの組合せで使用 する場合 接続ケーブル長を 変更する場合は取扱説明書に 従い調整を行ってください 必ず指定の型式のケーブルを 使用してください Adjust levitation according to instruction manual if pump and control unit have different serial number or you change connection cable length Use only designated type of cables 注意 CAUTION 3 Heavy...

Page 19: ...RNING 5 STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit 安全上の指示事項 SAFETY INSTRUCTIONS 使用前に取扱説明書を お読みください Read instruction manual before operation 6 Connector Caution Label This label describes lock of the connector This label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation コネクタ...

Page 20: ...TP pump rotates in this direction ROTATION 8 High Voltage Device Caution Label The STP control unit is equipped with a high voltage device This label warns operators to pay attention to the high voltage device 9 Voltage Rating Label This label describes the rated voltage of the STP control unit Use voltage specified in this label 200 240V 200V specification 1 4 ...

Page 21: ...erators so as not to touch the hot surface of the STP pump The use of the TMS unit may lead to a considerable rise in temperatures outside the STP pump This label warns operators so as not to burn hands only when using the TMS unit 警告 高温部 やけどします 触らないでく ださい WARNING Hot surface Can burn hands Do not touch 1 5 ...

Page 22: ...c bearing consists of 5 pairs of active magnetic bearings The rotor is supported in the radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor 3 and radial electromagnet 4 A pair of axial direction active magnetic bearings consists of axial sensor 5 and axial electromagnet 6 to support the rotor in the axial direction Because the rotor is supported w...

Page 23: ... Manual Installation 7 Touch down bearing 1 Rotor blade 2 Stator blade 3 Radial sensor 7 Touch down bearing 4 Radial electromagnet 3 Radial sensor 6 Axial electromagnet 5 Axial sensor Figure 2 1 Cross Sectional View of the STP Pump 2 2 ...

Page 24: ...itting hole attached to the inlet port flange Lift it with the aid of a suspension tool under the base when installing the STP pump without fitting hole Observe national laws regulations safety standards and so on when lifting the STP pump Use a crane or other appropriate means sufficient enough to withstand the load when lifting the STP pump Always lift the STP pump in stable places free of exces...

Page 25: ...tor STP connection cable 1 1 With both side connectors Inlet port cover 1 Outlet port cover 1 STP connector cover 1 Blank flange for purge port 1 KF10 Clamping ring for purge port 1 KF10 O ring washer for purge port 1 KF10 Leg 8 4 legs are attached to the STP pump Rubber foot for leg 4 Instruction Manual 1 1 The standard cable length is 5 m Both 10 m and 20 m are available Contact BOC Edwards on o...

Page 26: ...troduces a purge gas In order to protect the inside of the STP pump when pumping reactive or corrosive gases The STP pump is delivered with a blank flange attached to this port 5 Cooling Water Port PT 3 RC 1 1 4 Female Screw Connected to the STP pump cooling water pipe This port is used when water cooling the STP pump or using the TMS 4 unit 6 Temperature Sensor Connector optional accessory A temp...

Page 27: ...H1303 Series Instruction Manual Installation 6 Temperature sensor connector 5 Cooling water port 3 STP connector 4 Purge port 2 Outlet port flange 1 Inlet port flange Figure 4 1 Configuration of the STP Pump 4 2 ...

Page 28: ...mp is used in an area with radiation contact BOC Edwards Install the STP pump in a place meeting the following requirements Ambient Temperature 0 to 40 C Ambient Relative Humidity 30 to 95 no dew condensing Environment A place free of externally applied mechanical shock A place free of a heat source Keep clear of the heat source or attach a thermal shield plate A place free of a strong magnetic fi...

Page 29: ...cessively The L type STP connection cable is also offered Contact BOC Edwards if necessary 4 2 3 Bench A bench must be prepared by the customer to secure the STP pump The shape and size of the bench differ depending upon the type of STP pump Follow the precautions of the WARNING CAUTION or NOTICE See Section 4 3 3 How to Secure the STP Pump The STP pump is provided with a high speed rotor Any inte...

Page 30: ...with the customer application NEVER move them while the STP pump is in operation Confirm the dimensions by the external appearance of the STP pump when designing the bench The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of the inlet port flange When the external appearance of the STP pump is not in the manual contact BOC Edwards 4 5 ...

Page 31: ... Port Flange Vacuum Valve Dry Pump and other Pump Outlet Port STP Connection Cable Power Cable To Power Supply STP Control Unit Remote Cable To Vacuum Equipment Control Circuit Front Panel Vacuum Equipment Inlet Port The STP pump can be installed through the damper optional accessory Backing Figure 4 2 Installation of the STP Pump to the Vacuum Equipment 4 6 ...

Page 32: ...vent alcohol Dispose of the contaminated wipes appropriately according to the regulations of each national and or local government The splinter shield cannot perfectly prevent foreign materials from falling into the STP pump DO NOT install the STP pump in such a manner that foreign materials can easily fall into it for example Si wafers or samples are positioned above the STP pump If installing th...

Page 33: ...hen installing the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity This makes it possible to reduce the load on the magnetic bearing and the heat generated by the STP pump Outlet Port Outlet Port Outlet Port Outlet Port Direction of Gravity Figure 4 4 Positions...

Page 34: ...lange Refer to 2 When securing the inlet port flange with claw clamps Refer to 1 When securing the inlet port with bolts Secure the inlet port with Claw Clamps with bolts No Yes Damper In some cases the damper and the claw clamper securing cannot be used depend on the type of the STP pump Refer to Table 4 1 for tightening torque of the bolt Table 4 1 Tightening torque of bolt Size of bolt Tighteni...

Page 35: ...8 104 Base 8 positions securing No Yes No Yes No Yes Type of bolt R D S B 2 Standard R D S B 2 Standard Standard Standard Type of steel 1 Carbon steel Alloyed steel Stainless steel Carbon steel Alloyed steel Stainless steel Carbon steel Alloyed steel Stainless steel Recommended securing bolt for TMP Flange Strength 1 12 9 or more 70 or more Equivalent to AMS 6419 70 or more 12 9 or more 70 or more...

Page 36: ...bottom 2 When securing the inlet port flange with claw clamps Refer to Table4 2 for rotational torque When securing the inlet port flange with only the claw clamp the vacuum equipment cannot withstand the maximum rotational torque generated by the worst case failure To make the vacuum equipment withstand abnormal torque secure the base with all 8 screw holes for legs or all 8 attached legs Follow ...

Page 37: ...r legs or all 8 attached legs Follow CAUTION on page 4 9 about legs and bolts for securing the base When the base cannot be secured because of the equipment design install the pump with a torque restraint like the one shown in Figure 4 8 b Use a damper only at the vertically upright position DO NOT remove the bolts and nuts attached to reinforce the damper b When installing not to rotate a When se...

Page 38: ... as possible to keep the gas loss as low as possible 4 It is recommended to use a backing pump of pumping speed 1300 L min or more However the pressure at the inlet and outlet ports varies with the flow rate of gas capacity of the vacuum equipment length and material of the piping Select a backing pump in accordance with the capacity and starting method simultaneous starting starting after generat...

Page 39: ...een the STP pump outlet port flange and the backing pump Attach an absorption trap adjacent to the vacuum valve Attach an absorption trap adjacent to the vacuum valve Piping at the Inlet Port Flange Piping at the Inlet Port Flange Attach the inlet port to the high vacuum side Maximum working pressure 13 3 Pa 0 1 Torr for water cooled Pressure at the inlet port flange applicable continuously Piping...

Page 40: ...mp As shown in Figure 4 9 introduce a dry N2 gas through the electromagnetic vent valve needle valve or similar valve must be prepared by the customer from the purge port For instructions on how to introduce the purge gas see Section 5 1 Gas Pumping When not introducing the purge gas close the purge port with the blank flange attached at delivery Purge Port KF10 Dry Gas N2 or Other Figure 4 9 Conn...

Page 41: ...xcluding Li gases including Ga Hg In or Sn or HBr contact BOC Edwards Cool the STP pump to prevent the STP pump from overheating when pumping gases 5 1 1 How to Introduce a Purge Gas When pumping reactive or corrosive gases introduce a purge gas to protect the inside of the STP pump Doing so may result in product damage Connect a needle valve or a similar part to the purge port and introduce a dry...

Page 42: ... water containing foreign materials may corrode or clog the cooling water pipe When the cooling system is clogged with foreign materials clogs may possibly be removed by feeding cooling water reversibly When the STP pump is overheated due to shortage or suspension of water the protective function detects the overheated condition in the STP pump and stops the STP pump As a further safety procedure ...

Page 43: ...e vacuum equipment and the inner wall of the STP pump run the STP pump during baking 5 3 1 Attaching a Baking Heater 1 Install the backing heater special accessory near the inlet port flange in the perimeter of the envelope 2 Affix the hot surface warning label attached on the surface of the pump seen well See Figure 5 1 Attaching Positions of the Cooling Unit and Backing Heater Check the rated vo...

Page 44: ...STP H803 H1303 Series Instruction Manual Installation Baking Heater PT RC 1 4 Cooling Water Port Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater 5 4 ...

Page 45: ...SELECT Switch flat panel switch gray LCD display Confirmation mode change function valid in both MANUAL and REMOTE operations Setting mode change function valid in both MANUAL and REMOTE operations Press both of SELECT and UP switches simultaneously to enter the setting mode 6 UP Switch flat panel switch gray 7 DOWN Switch flat panel switch gray Abnormality error display change function valid in b...

Page 46: ...eed operation NORMAL OPERATION state 12 BRAKE Lamp green LED Lights during deceleration BRAKE state 13 POWER Lamp green LED Lights while the power is ON Goes out while the backup power is being supplied 14 FAILURE Lamp red LED Lights when any of the abnormalities errors occurs on the STP pump and the STP control unit The LCD displays an error message simultaneously 15 REMOTE Lamp green LED Lights ...

Page 47: ... Instruction Manual Installation STP CONTROL UNIT ON RESET UP SELECT DOWN ENTER START STOP ACCEL BRAKE POWER TEMP CTRL NORMAL FAILURE REMOTE 1 2 3 4 5 6 7 8 9 10 12 13 14 15 11 16 Figure 6 1 STP Control Unit Front Panel 6 3 ...

Page 48: ...wer input 18 MAIN POWER Breaker Switches ON OFF the primary power 19 P CONNECTOR Connector X1 A maximum voltage 79VAC For connection of the STP connection cable 20 REMOTE Connector X7 A maximum voltage Equal to the input voltage of this connector MAX 125VAC For the remote operation 21 TMS Connector X5 A maximum voltage Equal to the input voltage of AC POWER connector MAX 240VAC For the connection ...

Page 49: ...gas A place free of radiation A place free of strong magnetic and electric fields A place free of excessive vibration A place free of a source of electric noise Installation Condition Install the STP control unit horizontally within 10 C 6 2 2 Insulation Test Do not perform the insulation test insulation resistance test and withstand voltage test to the STP control unit When performing the insulat...

Page 50: ...rubber feet Space for connecting the cables Rear 11 5 cm or more The minimum bending radius of the STP connection cable is 100 mm See Section 13 External Appearance of the STP Control Unit Cable Space DO NOT excessively bend the cables and beware of any obstacles when installing the STP pump Also leave enough space to install other cables without bending them excessively 5cm 1 8cm or more 11 5cm o...

Page 51: ...rack to protect the STP control unit during transport remove the rubber foot from the bottom and attach the STP control unit to the rack using the screw holes for the rubber foot The STP control unit cannot be supported with only the screws on the front panel The STP control unit is a heavy product Always support it from the bottom When installing the STP control unit DO NOT block the ventilation ...

Page 52: ...54 100 105 97 STP Pump Side STP Control Unit Side φ20 6 60 Pin L Type Connector STP Connection Cable Pin 60 Pin Socket Blue label see NOTICE Figure 6 5 External Dimensions of Each Cable There are two types of STP connection cables These cables can be distinguished by a blue label This series pump can use either STP connection cable 6 8 ...

Page 53: ... L L1 Crimp Type Terminal Lug Power Cable φ 8 1 54 36 51 25 3 Pin Socket M4 1 a without power plug 1 STP Control Unit Side Power Side Primary 1 5mm2 3 cores φ8 1 Blown Blue Yellow Green or φ8 8 Black1 Black2 Yellow Green Power Cable 3 Pin Socket N L2 PE L L1 25 51 36 54 φ 8 1 49 5 φ 38 L L1 PE N L2 Plug type NEMA6 15 b with power plug Figure 6 6 External Dimensions of Each Cable 1 JIS 6 9 ...

Page 54: ...ge to each pin and DO NOT cause any short circuiting between pins Connect each cable securely DO NOT place heavy objects on the cables nor bend them excessively Support each cable so as not to apply direct force to the connectors or terminals If any problem occurs in cables connectors or terminals the STP pump may not function normally 1 Connecting the STP Connection Cable Connect the receptacle s...

Page 55: ...r Black2 Single phase 200 to 240 V AC 10 Both 50 60 Hz PE Yellow Green Ground Rear Panel AC POWER Outline of Connector L PE N Confirm the power voltage on the name plate Connect the power cable securely to prevent incorrect wiring DO NOT apply surge voltage exceeding 1 kV to the input power line Always ground the power cable to prevent electric shock 6 11 ...

Page 56: ...upting capacity AIC 6 5 2 Emergency Off Circuit EMO Circuit Activation of EMO circuit of the equipment will interrupt electrical power from the STP control unit When the power is shut off the STP pump performs the same as a power failure After backup operation of a power failure the rotor lands on the touch down bearing Consider the followings when establishing the EMO circuit Unite the exhaust ga...

Page 57: ...nd wiring of cables the STP pump is ready for start Check the following items before starting 1 Are the STP pump and the STP control unit secured according to the appropriate method 2 Is the power cable connected correctly to the power supply 3 Is the power voltage selected properly 4 Are the STP connection cable and other cables securely connected Are each terminal and each connector securely loc...

Page 58: ... operations are frequently performed the STP pump may overheat Avoid doing so 7 3 Stop Procedures Close the vacuum valve located at the outlet port flange side just before or after stopping the STP pump After closing the valve stop the backing pump DO NOT stop the backing pump without closing the vacuum valve Depending upon the type of the backing pump doing so could cause a reverse flow of atmosp...

Page 59: ... and the rotor levitates POWER ON state The POWER lamp lights 2 The STP control unit executes the self test If no error is found the LCD displays Levitation In case of the STP pump with the TMS unit optional accessory the TEMP CTRL lamp also lights and the TMS unit starts 7 4 2 Starting the STP Pump 1 Press the START switch on the front panel to start and accelerate the STP pump The ACCEL lamp lig...

Page 60: ...lamps of ACCEL NORMAL and BRAKE are off The magnetic bearing stops the rotor lands and the POWER lamp goes out POWER OFF state In case of the STP pump with the TMS unit optional accessory the TEMP CTRL lamp also goes out and the TMS unit stops 7 4 6 Starting the STP Pump after a Safety Function Operates A safety function operates when an abnormality error occurs in the STP pump or peripheral equip...

Page 61: ...it executes the self test If no error is found the LCD displays Levitation In case of the STP pump with the TMS unit optional accessory the TEMP CTRL lamp also lights and the TMS unit starts 7 5 2 Starting Stopping the STP Pump There are two methods of starting stopping the STP pump Use one of them Table 7 1 Starting Stopping the STP Pump during Remote Operation REMOTE X7 Method Starting the Pump ...

Page 62: ...cessory the TEMP CTRL lamp also goes out and the TMS unit stops 7 5 5 Starting the STP Pump after a Safety Function Operates A safety function operates when an abnormality error occurs in the STP pump or peripheral equipment To restart the STP pump remove the cause of the abnormality error after the BRAKE lamp goes out and perform the operation shown in Table 7 2 The FAILURE lamp goes out and the ...

Page 63: ...TMS unit operates regardless of the status of the STP control unit When the STP pump is the malfunction the TMS unit is stopped Operation 7 6 2 Temperature Control When the temperature of the STP pump base is lower than the setting value the TMS heater is turned ON and the cooling water value is turned OFF to heat the STP pump When the temperature of the STP pump base is higher than the setting va...

Page 64: ...MS unit Version Execute Self Test Levitation State Breaker ON Acceleration State Normal Operation State Brake State Self test completed upper only Self test in progress upper only Stop Operation of the STP Pump Start Operation of the STP Pump Upper Acceleration state Lower TMS actual temp for only with TMS unit Upper Normal operation state Lower TMS actual temp for only with TMS unit Upper Brake s...

Page 65: ...r connector is M2 6 2 19 37 1 20 Operation REMOTE X7 Pin Arrangement Procure the connector for remote connection at your company 8 1 Input Signal Pins Use input signal pins according to Table 8 1 and Figure 8 1 Remote input signals function during REMOTE operation only except the ROTATION INHIBIT signal is input Two abbreviations are used in Table 8 1 COM Common IN Input Pin 1 D Subminiature conne...

Page 66: ...ve is used to start the STP pump open the circuits between 1 3 to stop the pump 1 22 COM RESET IN Pins for inputting the abnormality RESET signal Short the circuits between 1 22 for 0 3 seconds or more to turn off the FAILURE lamp 1 5 COM INHIBIT Pins for inputting the rotation INHIBIT signal valid in both MANUAL and REMOTE operations When pins 1 5 are set to open the STP pump does not rotate even...

Page 67: ...HIBIT signal START STOP RESET INHIBIT スタート2 の場合 In case of Start 2 スタート1 の場合 In case of Start 1 Figure 8 1 REMOTE X7 Input Signal Pins 1 pin 0V is insulated from the frame ground The input current of remote input signal is approx 5mA Make sure the minimum applicable load of the relay contact when the remote operation with the relay 8 3 ...

Page 68: ...R ON state signal These pins are closed when the magnetic bearing functions and the rotor levitates This output is cut OFF at a power failure 10 29 ACCELERATION N O OUT Pins for outputting the ACCELERATION state signal These pins are closed when the STP pump is in acceleration 12 11 30 COM NORMAL OUT N C N O Pins for outputting the NORMAL OPERATION state signal When the STP pump is in rated operat...

Page 69: ...mperature of the TMS unit is within the setting temperature range 10 C the pins between 17 16 are closed and the pins between 17 35 are opened If the TMS unit function is not valid the pins do not function Pins for the emergency vent valve operation signal These pins are closed while this valve functions 7 26 L VALVE N O OUT The emergency vent valve is not used in this specification DO NOT use the...

Page 70: ...ns 12 13 32 33 15 14 REMOTE ACCELERTION NORMAL COM N C OUT NORMAL OPERATION state signal output pins BRAKE NO OUT Ｃ Ｒ ４ Ｃ Ｒ ５ Ｃ Ｒ ５ Ｃ Ｒ ６ Ｃ Ｒ ７ Ｃ Ｒ ７ ALARM COM Ｃ Ｒ ３ Ｃ Ｒ ２ N O OUT N O OUT N C OUT 16 17 35 ７ 26 AT TEMP COM N C OUT L VALVE NO OUT Ｃ Ｒ ８ Ｃ Ｒ ８ Ｃ Ｒ １ N O OUT BRAKE state signal output pins ALARM state signal output pins TMS unit rated state signal output pins Emergency vent valve open s...

Page 71: ...r relays CR1 to 8 in Figure 8 2 Table 8 3 Rated Contacts for Relays CR1 to CR8 Resistance Load COSφ 1 Rated Load 125V AC 0 5A 24V DC 1A Rated Current 2A Maximum Contact Point Current 1A Maximum Open Close Capacity AC 62 5 VA DC 30W Minimum Applicable Load 5V DC 1mA Operation 8 7 ...

Page 72: ...each cable 2 Switch ON the breaker on the rear panel 3 After the STP pump completes the self test and enters the levitation state or the error message CAUTION Bad EEPROM content is displayed set MANUAL REMOTE changeover switch to the manual and press the RESET switch on the front panel for approx 5 seconds Tuning starts with Tuning displayed on the LCD When the tunable error message such as CAUTIO...

Page 73: ...ing are recorded in the STP pump and STP control unit When tuning after changing the configuration the STP pump serial number the STP control unit serial number the STP pump data overrides the STP control unit data except control unit serial No and total hours of running control unit Table 9 1 shows the data recorded in the STP control unit The user setting may be changed when replacing the STP pu...

Page 74: ...Breaker ON CAUTION Bad EEPROM content Levitation Autotest Complete Software Version VER Tuning Tuning Complete Levitation State Press the RESET switch for about 5 sec Tuning Tuning Complete etc a status is displayed or Tuning Tuning Complete Levitation When the serial numbers do not match Operation Figure 9 1 Tuning Procedures 9 3 ...

Page 75: ...10 of the most recent errors Operation The emergency vent valve is not used with this series of STP pump Confirmation Method See Figure 9 2 1 Press the SELECT switch to enter Confirmation Mode The available menu groups items 1 through 5 above are displayed in order 2 Press the UP switch to display the next item Press the DOWN switch to display the previous item 3 Press the SELECT switch to display...

Page 76: ...DOWN UP DOWN UP DOWN UP Next item DOWN Previous item SELECT Next group or When equipped with a TMS only When equipped with a TMS only NORM rpm SELECT SELECT SELECT SELECT SELECT SELECT Total hours of running pump Pump serial no Control unit serial no Total hours of running control unit Number of starts Actual pump temperature TMS temperature setting Rated speed Remote mode Emergency vent valve Inh...

Page 77: ...switch to display the next parameter and the DOWN switch to display the previous one 3 Press the ENTER switch to set the parameter to the new setting 4 Press the SELECT switch to display the next item 5 Change the parameter by pressing the UP and DOWN switches then set it by pressing the ENTER switch 6 When the save screen is displayed select YES then press the ENTER switch to store the new parame...

Page 78: ...to go to next menu or ENTER to set to new parameter Press SELECT to go to next menu or ENTER to set to new parameter Select Remote Mode Rated Speed Setting TMS Function Setting INHIBIT Function Setting Emergency vent valve Setting RS232 485 Com RS232 485 Modbus and LONWORKS cannot be set in the current configuration See next page for details STORAGE NO STORAGE YES Not displayed when I O Remote STO...

Page 79: ...Modbus and LONWORKS only They are not displayed in I O Remote Mode UP DOWN Remote Mode Detail Settings To STORAGE Menu Press SELECT to go to next menu or ENTER to set to new parameter Press SELECT to go to next menu or ENTER to set to new parameter Press SELECT to go to next menu or ENTER to set to new parameter Press SELECT to go to next menu or ENTER to set to new parameter Press SELECT to go to...

Page 80: ...so the alarm signal output is reset ii The STP control unit does not detect a power failure of less than approx 2 seconds continuing rotating the STP pump 2 When the rotational speed is less than approx 8 000 rpm at a power failure Troubleshooting The STP control unit does not detect the power failure The rotor lands on the touch down bearing and stops Ⅱ Operation after a Power Recovery 1 MANUAL o...

Page 81: ... rpm LCD Message POWER lamp FAILURE lamp Power ON signal ALARM signal 8 000 or more Mains Failure OFF ON OFF ON Less than 8 000 OFF OFF OFF OFF OFF Table 10 2 Operations of the STP Pump after a Power Recovery MANUAL operation REMOTE operation Rotational speed rpm Duration of power failure STP pump operation after a power recovery START REMOTE signal input after a power recovery STP pump operation ...

Page 82: ...touch the touch down bearing due to external vibration impact intrusion of atmosphere or foreign materials into the STP pump or rotor imbalance the STP pump decelerates and stops The FAILURE lamp lights and the LCD displays error message Disturbance _ Troubleshooting 10 4 Motor Driver Overload When the STP pump does not attain the rated speed within approx 30 minutes after starting or when the ACC...

Page 83: ...splays error message OVERSPEED 10 8 Abnormality Error in the TMS Unit for Use with the TMS Unit 1 Abnormality Error in the TMS Unit i If the temperature of the STP pump base unit is 10 C higher or 10 C lower than the setting value due to the occurrence of an abnormality error in the TMS heater or other causes the STP pump decelerates and stops Output of the heater and the cooling water unit is OFF...

Page 84: ...tion Cable and Connectors When an abnormality error occurs in the TMS connection cable the STP pump decelerates and stops Output of the heater and the cooling water unit is OFF The FAILURE lamp lights and the LCD displays error message T Cable Disconnect Troubleshooting 10 5 ...

Page 85: ... Abnormal magnetic bearing Rotor descends onto the touch down bearing FAILURE Disturbance _ ALARM The STP pump stops STP connection cable breakage STP connection cable disconnection Abnormal control circuit Possible Excessive vibration Rotor vibrates excessively to come into contact with the touch down bearing FAILURE Disturbance _ ALARM The STP pump decelerates and stops External vibration and im...

Page 86: ...f vacuum equipment or piping Continuous repetition of startup stop Extraordinarily high temperature Possible CAUTION CNT heat The STP pump does not stop Overheating inside the STP control unit Temperature inside the STP control unit rises FAILURE CNT Overheat ALARM The STP pump decelerates and stops Failure in the cooling fan Shielding of cooling air inlet and ventilation port Extraordinarily high...

Page 87: ...rates and stops Output of heater and cooling water valve is OFF Abnormal cooling water Heater disconnect Possible Failure of TMS unit TMS heater overheats FAILURE TMS Overheat ALARM The STP pump decelerates and stops Output of heater and cooling water valve is OFF Error abnormality detection above does not function Impossible Failure of TMS connection cable TMS connection cable or its connector is...

Page 88: ...ower Failure Establish a sequence so that the power can be supplied to the STP control unit immediately after a power recovery 11 1 2 Troubleshooting Other Abnormality Error Troubleshooting Refer to Section 7 4 6 and 7 5 5 Starting the STP Pump after a Safety Function Operates i After confirming the BRAKE lamp goes out and the STP pump stops remove the probable cause of the abnormality When the LC...

Page 89: ...oll display the contents of the next or previous error message The UP or DOWN switch can also be input in Remote Mode Example Press DOWN Switch BRAKE 00rpm Error n 1 3 BRAKE 00rpm Error n 2 3 Press UP Switch BRAKE 00rpm Disturbance Y_H 1 3 BRAKE 00rpm Mains Failure 1 3 Displayed alternately Press UP Switch Displayed alternately Troubleshooting The upper message on the LCD shows the current STP pum...

Page 90: ...ng turning 2 Use of different version of the software 3 Failure of the STP pump or the STP control unit 1 Perform turning again Reconfigure the initialized settings 2 Perform tuning 3 Contact Service office 9 1 9 3 9 1 Malfunction information CAUTION CNT heat 1 CAUTION CNT heat 2 Overheat inside the STP control unit the STP pump does not stop 1 High ambient temperatures 2 Insufficient cooling of t...

Page 91: ... STP control unit Contact Service office Malfunction information DRIVER com Failure Failure of the STP control unit Contact Service office Malfunction information DSP PCB com fail Failure of the STP control unit Contact Service office Malfunction information Disturbance X_B Disturbance X_H Disturbance Y_B Disturbance Y_H Disturbance Z Abnormal magnetic bearing 1 Change of the cable length 2 Discon...

Page 92: ...ng inside the STP pump 1 Overheating during baking 2 Insufficient cooling 3 Leakage of the vacuum piping system 4 Repetitious start stop operations 1 Set the temperature of the baking heater to 120 C or less 2 At the time of baking or gas pumping always cool the STP pump 3 Check the piping system for leakage 4 Repetitious start stop operations may cause the STP pump to overheat 5 3 5 2 4 3 4 7 3 M...

Page 93: ...nt of the damage on the touch down bearing exceeds the second damage limit and the start is not allowed Overhaul is needed Contact Service office Malfunction information Speed Pulse Lost Failure of the STP pump Contact Service office Malfunction information Failure of the STP control unit Contact Service office Malfunction information T Cable Disconnect Disconnection of the TMS connection cable Co...

Page 94: ...S unit becomes 10 C or less such error cannot be detected within 1 hour after startup 1 Failure of the TMS heater 2 Failure of the TMS unit 1 Contact Service office 2 Contact Service office Malfunction information Malfunction information TMS overheat Overheat of the TMS heater 1 Failure of the TMS heater 2 Failure of the TMS unit 1 Contact Service office 2 Contact Service office Malfunction inform...

Page 95: ...occurred 10 1 11 3 2 Abnormalities When Performing the STP Pump Start Operation When the FAILURE lamp lights and the LCD displays an error message see Section 11 2 When Error Message is Displayed on LCD Table 11 3 Troubleshooting When Performing the STP Pump Start Operation Troubleshooting No Symptom Probable cause Countermeasures Referred Section 1 The MANUAL REMOTE changeover switch is not at th...

Page 96: ... gases remain inside the STP pump contact Service office when it is needed to be cleaned 5 3 11 8 3 2 The STP pump stops ROTATION INHIBIT signal input pins REMOTE X7 1 5 are opened When not using this function short the circuit between 1 5 or set Inhibit Command to DISABLE If these pins are opened the STP pump will not rotate after performing start operation 8 1 9 3 3 The TMS unit does not functio...

Page 97: ...he WARNING message cannot be reset by the RESET switch Service office is in charge of resetting the WARNING message The STP pump can operate even when the WARNING message is displayed It is recommended to have the STP pump overhauled as soon as possible Troubleshooting The STP pump can operate even when the WARNING message is displayed except when Second Damage Limit is displayed Overhaul the STP ...

Page 98: ...w the error record push the SELECT switch follow the instructions for entering Confirmation Mode in Section 9 The error number of up to the last 10 errors is displayed on the upper line of the LCD in the form Error Record n and the contents of the error is displayed on the lower line The first number of shows the number of the error the most recent error is number 1 and the second number shows the...

Page 99: ...ing maintenance and inspections of the STP pump and STP control unit Failure to do so may result in the inadvertent rotation of the STP pump which may result in an accident Do not touch any place other those specified when performing maintenance or inspecting the pump and NEVER open any panel because it could cause shock malfunction or short circuit Troubleshooting Power OFF the baking heater and ...

Page 100: ... Interior The decontamination overhaul in the STP pump is executed in Service office When overhaul is needed contact Service office Exterior Wipe with proper solvent such as alcohol When dust has accumulated in the ventilation port wipe off or vacuum it with the cleaner In this case dust must not enter in the STP control unit Clean off with a pure gas when dust has accumulated in the connector Whe...

Page 101: ...ome extent an overhaul cleaning is required Contact Service office Note that the costs of troubleshooting problems resulting from deposit will be at your own charge even during the warranty period If a problem resulting from deposit occurs inside the STP pump hermetically seal inlet port outlet port purge port and leak port flanges and immediately return them to Service office For the transport me...

Page 102: ... process 2 years Processes resulting in accumulation of deposits in the pump will require more frequent service Clean applications Only vacuum pumping 5 years Other use 2 years Dependent on application contact BOC Edwards The touch down bearing inside the STP pump will be worn out after a number of full speed touchdowns When the STP control unit displays w it is essential to have the touch down be...

Page 103: ...ore returning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump particularly when corrosive reactive or flammable gases have been used ii Vacuum and hermetically seal the STP pump before transport iii Specify the type of gases used and handling precautions in the Malfunction Information and return the STP pump to Service office Trou...

Page 104: ...ere are corrosive gases Place subjected to dripping water Place with a lot of dust Place with insufficient ventilation Place subjected to strong magnetic or electric fields Place subjected to radiation Troubleshooting 12 2 Storage of the STP Control Unit If the STP control unit including cables is not used for a long period more than a few months follow the precautions below 1 Store the STP contro...

Page 105: ...ide the STP pump thoroughly Residual gases may result in an accident when disposing of the STP pump If the STP pump has been used with reactive or corrosive gasses always clean thoroughly before disposing of it to avoid any injury Confirm the characteristics of gas to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier BOC Edwards is not responsible for proble...

Page 106: ...ted speed rpm 32 500 Starting time min 7 Stopping time min 8 Noise dB 50 at 32 500 rpm Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling method Water cooling Standard backing pump L min 1 300 Mass 2 kg 39 Dimensions mm Φ270 H343 VG150 Φ270 H350 ISO160F Φ270 H312 Ambient temperature range C 0 to 40 Storage temperature range C 25 to 55 The values shown in the ...

Page 107: ...onnector Optional accessory Bending dimensions of the STP connection cable A Figure 13 1 External Appearance of the STP Pump STP H803 Series φ 165 φ 170 φ 1 8 0 157 147 5 3 0 ﾟ 3 0 ﾟ 2 0 ﾟ 2 5 ﾟ 4 5 ﾟ φ 2 1 0 Outlet port flange KF 1 40 Cooling water port PT 2 RC 1 1 4 Screw hole for leg 8 M12 1 Depth24 Purge port KF 1 10 Viewed from Arrow A 1 JIS 2 Conform to ISO Unit mm 1 8 0 Specification Figure...

Page 108: ... Screw hole for leg 8 M12 1 Depth 24 Purge port KF 1 10 1 JIS 2 Conform to ISO Unit mm STP connector Inlet port flange ISO200F 180 35 15 27 φ 2 6 0 φ 2 7 0 15ﾟ 2 2 5 ﾟ 87 37 8 9 φ 300 φ 285 φ 237 φ 270 16 208 262 304 A Inlet port flange VG200 M12 Depth 20 Temperature sensor connector Optional accessory 335 or less Bending dimensions of the STP connection cable Specification Figure 13 2 External Ap...

Page 109: ... SERIAL NO MANUFACTURING DATE WEIGHT kg RATED SPEED rpm MANUFACTURED BY BOC Edwards Technologies Ltd Narashino Japan Manufactured by BOC Edwards at the former Seiko Seiki plant in Narashino Japan STP CE Figure 13 3 Label Affixing Positions for the STP Pump 13 4 ...

Page 110: ...Hz 542 Ambient temperature range C 0 to 40 Storage temperature range C 25 to 55 Mass 1 kg 9 Dimensions mm W210 H132 5 D401 6 TMS control unit Internal Operation switches START switch flat panel switch green STOP switch flat panel switch dark gray RESET switch flat panel switch gray SELECT switch flat panel switch gray UP switch flat panel switch gray DOWN switch flat panel switch gray ENTER switch...

Page 111: ...MOTE X7 37 pins Input output cables Power primary cable STP connection cable TMS connection cable optional accessory Safety functions Magnetic bearing abnormality error detection STP pump overheat detection Driver overload detection Power failure detection STP pump overspeed detection STP control unit overheat detection TMS unit failure detection Other TMS unit failure detection Specification 13 6...

Page 112: ...STP H803 H1303 Series Instruction Manual Figure 13 4 External Appearance of the STP Control Unit 13 7 ...

Page 113: ...SCU MANUFACTURING DATE POWER CONSUMPTION POWER SUPPLY 50 60Hz 1φ AC WEIGHT kg V VA Manufactured by BOC Edwards at the former Seiko Seiki plant in Narashino Japan MANUFACTURED BY BOC Edwards Tecnologies Ltd Narashino Japan CE Figure 13 5 Label Affixing Positions for the STP Control Unit 13 8 ...

Page 114: ...m inch 1 100 1 00x10 3 39 4 0 01 1 10 0 0 394 1x10 3 0 10 1 39 4x10 3 25 4x10 3 2 54 25 4 1 Weight g kg lb 1 1 00x10 3 2 20x10 3 1x10 3 1 2 20 454 0 454 1 Pressure Pa Torr kgf cm 2 1 7 50x10 3 1 02x10 5 133 1 1 36x10 3 9 81 x 10 4 736 1 ...

Page 115: ...ufacture BOC Edwards Japan Limited 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Telephone Domestic 03 5470 6530 International 81 3 5470 6530 Facsimile Domestic 03 5470 6521 International 81 3 5470 6521 Copyright 2003 BOC Edwards Japan Limited All rights reserved ...

Page 116: ...he STP H803 H1303 Series and the STP H803C1 For the Safety Precautions installation operation and maintenance read the STP H803 H1303 Series Instruction Manual Keep this Manual in a place where you can quickly access it at any time BOC Edwards Japan Limited Dec 2003 Copyright 2003 BOC Edwards Japan Limited All rights reserved Printed in Japan ...

Page 117: ...chemical specific 1 For the specifications of other models of the STP H803C1 pump contact BOC Edwards In this manual the above STP pump series is collectively referred to as the STP pump This Manual picks up the points of difference between the STP H803 H1303 Series and the STP H803C1 For the Safety Precautions installation operation and maintenance read the STP H803 H1303 Series Instruction Manua...

Page 118: ...t TABLE OF CONTENTS 1 Specifications 1 1 1 1 Specifications for the STP Pump 1 1 1 2 Specifications for the STP Control Unit 1 2 TABLES Table 1 1 Specifications for the STP Pump 1 1 Table 1 2 Specifications for the STP Control Unit 1 2 2 ...

Page 119: ...ime min 8 Noise dB 50 at 34 500 rpm Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling method Water cooling Standard backing pump L min 1 300 Mass 3 kg 39 Dimensions mm φ270 H343 VG150 φ270 H350 ISO160F Ambient temperature range C 0 to 40 Storage temperature range C 25 to 55 The values shown in the table are typical They are not guaranteed 1 The pressure is a...

Page 120: ...e temperature range C 25 to 55 Mass 2 kg 9 Dimensions mm W210 H132 5 D401 6 TMS control unit Internal Operation switches START switch flat panel switch green STOP switch flat panel switch dark gray RESET switch flat panel switch gray SELECT switch flat panel switch gray UP switch flat panel switch gray DOWN switch flat panel switch gray ENTER switch flat panel switch gray MANUAL REMOTE changeover ...

Page 121: ...6 pins REMOTE X7 37 pins Input output cables Power primary cable STP connection cable TMS connection cable optional accessory Safety functions Magnetic bearing abnormality error detection STP pump overheat detection Driver overload detection Power failure detection STP pump overspeed detection STP control unit overheat detection TMS unit failure detection Other TMS unit failure detection ...

Page 122: ...ufacture BOC Edwards Japan Limited 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Telephone Domestic 03 5470 6530 International 81 3 5470 6530 Facsimile Domestic 03 5470 6521 International 81 3 5470 6521 Copyright 2003 BOC Edwards Japan Limited All rights reserved ...

Page 123: ... hazardous materials Note Some contaminated equipment may not be suitable for airfreight PROCEDURE 1 Contact BOC Edwards and obtain a Return Authorisation Number for your equipment 2 Complete the Return of BOC Edwards Equipment Declaration HS2 3 If the equipment is contaminated you must contact your transporter to ensure that you properly classify the hazard mark manifest and ship the equipment in...

Page 124: ...proof of decontamination YOU MUST CONTACT BOC EDWARDS FOR ADVICE BEFORE YOU RETURN SUCH EQUIPMENT Print your name _________________________________Print your job title _________________________ Print your organisation ____________________________________________________________________ Print your address _______________________________________________________________________ ______________________...

Page 125: ...OC EDWARDS Ammerthalstraße 36 85551 Kirchheim Munich Tel 49 89 99 19 18 0 Fax 49 89 99 19 18 99 HONG KONG S A R BOC EDWARDS ASIA 12 Chun Yat Street Tseung Kwan O Industrial Estate Tseung Kwan O Kowloon Hong Kong S A R Tel 852 2372 2640 Fax 852 2796 9095 INDIA BOC EDWARDS DIVIN OF BOC INDIA LIMITED 203 Surya Kiran Building 19 Kasturba Gandhi Marg New Delhi 110 001 India Tel 91 11 851 0065 Fax 91 11...

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