336
Chapter 6
Specifications
E5010B Spinstand Specifications
E5010B Spinstand Specifications
NOTE
E5010B is the obsolete product.
X-Y Stage (Coarse Positioning Stage):
Piezo Stage (Fine Positioning Stage):
Spindle:
Table 6-52
Stage Type:
Air Bearing, dual axis stage with vacuum lock down feature
Stage Travel :
140 mm
×
100 mm (5.5"
×
4")
Linear Scale Resolution:
100nm (4
µ
")
Position Repeatability :
5
µ
m (200
µ
")
Position Accuracy:
15
µ
m (600
µ
")
Skew Range:
+30
o
(max), -60
o
(min)
Table 6-53
Stage Type:
Piezo translator operated flexure substage
Stage Travel :
15
µ
m (600
µ
")
Travel Resolution:
2.5 nm (0.1
µ
")
Position Accuracy:
50 nm (2
µ
")
Position Repeatability:
5 nm (0.2
µ
"), 1
σ
Table 6-54
RPM :
1,000 to 15,000 rpm
RPM Accuracy:
0.1 % @
≥
3,000 rpm
RPM Jitters:
0.01 % @
≥
3,000 rpm
Asynchronous Rotational Error:
1
µ
" axial/radial @
≥
3,000 rpm
Asynchronous Position Jitters:
(Non Repeatable Runout)
< 10 nm (< 0.4
µ
"), 1
σ
Rotational Direction :
CW, CCW
Clamp Size:
2.5”, 3.0/3.5"
Bearing:
Air Bearing
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