Request for Return
FAILURE REPORT
TURBO PUMPS and TURBOCONTROLLERS
POSITION
PARAMETERS
Does not start
Noise
Vertical
Power: Rotational
Speed:
Does not spin freely
Vibrations
Horizontal
Current: Inlet
Pressure:
Does not reach full speed
Leak
Upside-down
Temp 1:
Foreline Pressure:
Mechanical Contact
Overtemperature
Other:
Temp 2:
Purge flow:
Cooling defective
…………………. OPERATION TIME:
TURBOCONTROLLER ERROR MESSAGE:
ION PUMPS/CONTROLLERS
VALVES/COMPONENTS
Bad feedthrough
Poor vacuum
Main seal leak
Bellows leak
Vacuum leak
High voltage problem
Solenoid failure
Damaged flange
Error code on display
Other
Damaged sealing area
Other
Customer application:
Customer application:
LEAK DETECTORS
INSTRUMENTS
Cannot calibrate
No zero/high backround
Gauge tube not working
Display problem
Vacuum system unstable
Cannot reach test mode
Communication failure
Degas not working
Failed to start
Other
Error code on display
Other
Customer application:
Customer application:
PRIMARY PUMPS
DIFFUSION PUMPS
Pump doesn’t start
Noisy pump (describe)
Heater failure
Electrical problem
Doesn’t reach vacuum
Over temperature
Doesn’t reach vacuum
Cooling coil damage
Pump seized
Other
Vacuum leak
Other
Customer application:
Customer application:
FAILURE DESCRIPTION
(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):
NOTA: Su richiesta questo documento è disponibile anche in Tedesco, Italiano e Francese.
REMARQUE : Sur demande ce document est également disponible en allemand, italien et français.
HINWEIS: Auf Aufrage ist diese Unterlage auch auf Deutsch, Italienisch und Französisch erhältlich.
Summary of Contents for 929-0022
Page 2: ...Sublimation Controller ...
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