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LS Module
(AQ2200-112)
Available in firmware versions 3.08 and later
Code
Error Message
Description
Corrective Action
1100
LS Lock
Laser output is locked.
Attach an interlock connector to the rear of the frame controller.
If the same message continues to appear, set Lock to Off on the
frame controller’s SYSTEM screen.
1102
Update Error
A failure occurred during a
firmware update.
Restart the instrument.
If the same message continues to appear, servicing is required.
1110
Temperature Limit
Error
The internal temperature is
abnormal.
Turn the power off and confirm that the frame controller’s inlet
and exhaust holes are not blocked. After waiting for some
time, restart the instrument. If the same message continues to
appear, servicing is required.
1111
Opt Lock Error
Laser output is locked. Optical
output cannot be turned on.
Unlock the laser output.
For details see section 4.1, “Troubleshooting.” If the same
message continues to appear, servicing is required.
1170
Module Execution
Error
The internal optical module is not
operating.
Restart the instrument.
If the same message continues to appear, servicing is required.
1172
Module
Temperature Error
The temperature inside the
internal optical module is too high.
Turn the power off. After waiting for some time, restart the
instrument. If the same message continues to appear, servicing
is required.
1175
Module
Communication
Error
Communication error with the
internal optical module.
Restart the instrument.
If the same message continues to appear, servicing is required.
1179
Module Power Error The specified power value and the
laser output power are different.
Restart the instrument.
If the same message continues to appear, servicing is required.
1180
Module Fatal Error Internal optical module error.
Restart the instrument.
If the same message continues to appear, servicing is required..
1182
Module Voltage
Error
The internal voltage is abnormal. Restart the instrument.
If the same message continues to appear, servicing is required.
Grid TLS Module
Available in firmware versions 3.00 and later
Code
Error Message
Description
Corrective Action
1111
Opt Lock Error
Laser output is locked. Optical
output cannot be turned on.
Unlock the laser output.
For details see section 4.1, “Troubleshooting.” If the same
message continues to appear, servicing is required.
1170
Module Execution
Error
The internal optical module is not
operating.
Restart the instrument.
If the same message continues to appear, servicing is required.
1172
Module
Temperature Error
The temperature inside the
internal optical module is too high.
Turn the power off. After waiting for some time, restart the
instrument. If the same message continues to appear, servicing
is required.
1175
Module
Communication
Error
Communication error with the
internal optical module.
Restart the instrument.
If the same message continues to appear, servicing is required.
1177
Temperature Error The temperature inside the
module is too high.
Turn the power off and confirm that the frame controller’s inlet
and exhaust holes are not blocked. After waiting for some
time, restart the instrument. If the same message continues to
appear, servicing is required.
1178
Module Frequency
Error
The specified frequency and
the laser output frequency are
different.
Restart the instrument.
If the same message continues to appear, servicing is required.
1179
Module Power Error The specified power value and the
laser output power are different.
Restart the instrument.
If the same message continues to appear, servicing is required.
1180
Module Fatal Error Internal optical module error.
Restart the instrument.
If the same message continues to appear, servicing is required..
1182
Module Voltage
Error
The internal voltage is abnormal. Restart the instrument.
If the same message continues to appear, servicing is required.
4.2 Error Messages
4-9
IM 735101-01EN
Troubleshooting, Maintenance, and Inspection
1
2
3
4
5
Index