
48
6.
Maintenance Method
Vacuum pump
(b) Replacing the head gasket
Remove one cross-recessed pan-head machine screw
(
M4
×
6
)⑦
of head cover
⑥
.
There is a black head gasket
⑧
under the head cover. Remove this gasket and replace the
new one.
(※)
There are total of two hea gasket
⑧
, one for each pump head.
Reassemble the head gasket and head cover in this order to the pump head.
また、
During reassembly, apply small amount (enough to cover three to four threads at the
end) of an agent to prevent loosening (Locktight 242, etc.) to cross-recessed
pan-head machine screws
(
M4x6
)
. Tighten screws with a torque of 1.2
~
1.3 N
・
m.
(c) Replacing suction
・
exhaust valves
(
special tool necessary
)
Remove one cross-recessed pan-head machine screw
(
M4
×
6
)⑦
of head cover
⑥
, and
remove the head gasket
⑧
.
Remove four cross-recessed pan-head machine screws
(
M4
×
12(with SW)
)②
of the pump
head
①
.
Remove the screw
(
M3
×
4
)⑨
and valve holder
⑩
on both sides of pump head and replace
suction
・
exhaust valves
⑪
.
(※)
There are a total of four suction
・
exhaust valves
⑪
, two for each pump head.
During reassembly, apply small amount of an agent to prevent loosening (Locktight
242, etc.) to cross-recessed screws
(
M3
×
4
)⑨
. Tighten screws with a torque of 0.2
~
0.25 N
・
m.
Exploded diagram