Veeco 004-210-000, Инструкция по эксплуатации

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SPM Fundamentals for the MultiMode
Hardware
22 MultiMode SPM Instruction Manual Rev. B
Because each scanner exhibits its own unique piezo properties, each has its own parameter fi le.
When scanners are changed, the parameter fi le for the new scanner is changed along with it,
ensuring maximum accuracy at any scan size. Loading new parameter fi les requires only a few
seconds. Table 2.1a describes the range capabilities of each MultiMode SPM scanner.
Table 2.1a MultiMode SPM Scanner Specifications
Figure 2.1f depicts the electrode con fi guration used on one type of scanner piezo tube. Electrodes
are oriented as shown when the MultiMode is viewed from the front. AC signals applied to
conductive areas of the tube create piezo movement along the three major axes. With the
Scan
angle parameter in the control panel set to 0.00 , the fast-scan direction is in the direction of the X-
axis.
Figure 2.1f Typical Scanner Piezo Tube and X-Y-Z Electrical Con fi gurations
Model Scan Size Vertical Range
AS-0.5 (“A”) 0.4µm x 0.4µm 0.4µm
AS-12 (“E”) 10µm x 10µm 2.5µm
AS-12V (“E” vertical) 10µm x 10µm 2.5µm
AS-130 (“J”) 125µm x 125µm 5.0µm
AS-130V (“J” vertical) 125µm x 125µm 5.0µm
AS-200 200µm x 200µm 8.0µm
X X
Y
Y
~
~
±Y
±X
~
±Z
Z