Calibration, Maintenance, Troubleshooting and Warranty
Vertical Engagement Scanners—Installation, Use, and Maintenance
Rev. B
MultiMode SPM Instruction Manual
331
The scanner
fi
le may be copied with any name, as long as it includes a .SCN extension. Make
certain the vertical scanner’s
fi
le name is not the same as a preexisting
fi
le; otherwise, it will
overwrite the preexisting
fi
le.
4. Once the scanner file is copied, reboot the NanoScope software to resume.
Note:
The vertical scanner
fi
les are identical to all other “J” and “E” scanner
fi
les
except for the
Motor sensitivity
parameter. On vertical scanners this parameter
value is larger than older models. A summary of
Motor Sensitivity
parameter
values is provided below.
15.16.2
Select scanner
Select
Realtime
>
Microscope > Scanner
and choose the appropriate scanner. After highlighting
the newly copied scanner
fi
le, then click on the panel’s
Ok
button to exit.
15.16.3
Inspect scanner
Load a calibration reference (e.g., P/N 498-000-025) on the MultiMode SPM, engage the tip on the
surface and obtain an image. Verify that the scanner is working properly, and take a series of
measurements on the calibration reference to ensure accuracy.
If the calibration reference is not measuring accurately, it may be necessary to calibrate software
parameters to ensure measuring accuracy. This calibration procedure is detailed in earlier sections
of this chapter. Follow the instructions to properly recalibrate your vertical scanner.
Motor Sensitivity
parameter value
(Tip travel per half step)
AFM, LFM,
TipView STM
MultiMode AFM
Vertical Scanners
80
110
3-screw Scanners
19
26