Calibration, Maintenance, Troubleshooting and Warranty
Calibration of “A” Scanners for Atomic-scale Measurement
308
MultiMode SPM Instruction Manual
Rev. B
5. Go to the
Offline
>
View
>
Top View
option and measure the spacings between atoms using
the mouse. Depending upon whether the sample is graphite or mica, measure the spacings as
shown below.
Record the spacings between at least ten atoms observed in the captured image. Take several
samples of each measurement and average them to ensure accurate results. (Achieve this quickly by
alternatively “walking” the cursor line from atom to atom; the average distance displays on the
bottom-right corner of the display monitor’s status bar). If the measurements vary by more than 2
percent from the dimensions shown above, make a correction.
6. Correction of the X- and Y-axis is essentially the same procedure as described in
-
of this chapter and will not be repeated here. The only significant
difference is that you must adjust the known distances for the smaller, atomic spacings of the
atoms. Furthermore, you only adjust the sensitivity parameters for atomic-scale imaging;
namely:
•
X fast sens
at
0º
Scan angle
•
Y slow sens
at
0º
Scan angle
•
Y fast sens
at
90º
Scan angle
•
X slow sens
at
90º
Scan angle
A
B
C
A = 0.519nm
B = 0.900nm
C = 1.37nm
A
B
C
A = 0.255nm
B = 0.433nm
C = 0.666nm
Atomic Spacing for Mica
Atomic Spacing for Graphite
