Introduction to the Digital Instruments MultiMode SPM
Introduction
2
MultiMode SPM Installation Manual
Rev. B
1.1
Introduction
The MultiMode scanning probe microscope (MM-SPM) is designed for imaging small (approx.
1.5cm dia.) samples using a series of interchangeable scanners and is able to provide images from
the atomic scale to 175µm in size. This manual is designed to assist operators with using the MM-
SPM. Refer to the Command Reference Manual (004-122-000) (or appropriate software manual)
for more information. This manual is designed for use with the NanoScope III or IIIa; if you have a
NanoScope IV, or an Extender, refer to those manuals as well.
The MM-SPM is designed around a stationary probe. That is, samples are scanned back and forth
beneath the probe. (This is opposite to other Veeco designs—e.g., Dimension Series SPMs—in
which mounted samples are stationary while the probe scans back and forth above them.) Typically,
samples are
fi
xed to round 1.5cm metal disks (“pucks”), then magnetically attached to the top of
the scanner tube. As the scanner moves back and forth, the sample moves with it, allowing the
probe to extract information from the sample surface much like a phonograph needle plays a vinyl
record.
Because the size of features imaged with SPM is often below the visible wavelength of light, all
information gathered from sample surfaces is electronically derived and rendered. The MultiMode
is electronically controlled by the present software control system, NanoScope Version 5. Veeco
has divided its SPM software into a two-function architecture:
Realtime
and
Of
fl
ine
. The
Realtime
software functions are dedicated to running the actual microscope, changing the size and
location of scans, controlling gains, and so on. Images produced from scans may be analyzed and/
or modi
fi
ed using the
Of
fl
ine
functions.
Of
fl
ine
mode yields sectional pro
fi
les, corrects for noise
and artifacts, analyzes for depth, roughness, grain size and power spectral density, and performs
many other functions. One major advantage to the NanoScope design is that both modes may be
run simultaneously. That is, the microscope can save (“capture”) images in
Realtime
mode while
the operator analyzes earlier images in the
Of
fl
ine
mode, making the MM-SPM a maximum-
productivity tool.