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87-900-879-01 (A)

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SAFETY SUMMARY

Operators and service personnel must be aware of all hazards associated with this equipment. They must know how
to recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of
unskilled, improper, or careless operation of the equipment can be serious. This product must only be operated and
maintained by trained personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional information provided by Varian.
All warnings and cautions should be read carefully and strictly observed. Address any safety, operation, and/or
maintenance questions to your nearest Varian office.

The following format is used in this manual to call attention to hazards:

!

Warning are used when failure to observe instructions or precautions could result in injury or death.

Cautions are used when failure to observe instructions could result in damage to equipment, whether Varian supplied or

other associated equipment.

NOTE

Infomation to aid the operatr in obtaining the best performance from the equipment.

WARNING!

CAUTION!

Содержание Turbo-V70

Страница 1: ...87 900 879 01 A APRIL 2002 INSTRUCTION MANUAL Turbo V70 controller Eurocard Model 969 9514 vacuum technologies...

Страница 2: ...utline 3 II Installation 2 1 General 4 2 2 J2 connector 4 2 3 J3 connector 4 2 4 J4 connector 4 2 5 J5 RS 232 interface connector 4 2 6 RS 232 communication description 5 III Operation 3 1 General 7 3...

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Страница 4: ......

Страница 5: ...operation maintenance manuals and any additional information provided by Varian All warnings and cautions should be read carefully and strictly observed Address any safety operation and or maintenance...

Страница 6: ...ncy converter which is driven by a single chip microcomputer and is composed of a PCB which includes all the circuitry necessary for its operation The microcomputer generates the variable output volta...

Страница 7: ...SECTION I DESCRIPTION 87 900 879 01 A 3 1 4 Controller outline The outline dimension for the controller are shown in Fig 1 1 Figure 1 1 Controller outline...

Страница 8: ...the following Pin 3 Failure When a fault condition is detected the pump is stopped and a signal is present on this pin Pin 5 Low Speed mode activated When the Low Speed mode is activated a signal is p...

Страница 9: ...ter reading request 06 parameter writing Data in this controller it can be in the case of parameter reading request 000000 or 111111 in the case of YES NO command or parameter writing a six numeric ch...

Страница 10: ...l to 1 can be only read equal to 1 can be only written PARAMETER NUMBER TYPE DESCRIPTION X0002 D Low speed ON OFF X0003 D Pump ON OFF X0008 D Remote ON OFF 10009 D Error acknowledgment error status cl...

Страница 11: ...the same connector To switch off the pump is necessary to connect pin 12 of J4 connector to pin IS ground of the same connector 3 3 Low speed activation deactivation To activate the Low Speed status...

Страница 12: ...signals the error occurred by means of a diagnostic LED located on the board and on the RS 232 port The LED blinks in a coded mode it flashes a number of time equal to the error code see the following...

Страница 13: ...TIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping E...

Страница 14: ...rate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Oth...

Страница 15: ...an India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 1...

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