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100 87-900-986-01 (
C
)
Offset
Byte
Size
Byte
Unit
Res
Range
Description
WIN Serial
18
1
-10 - +10
Setpoint 2 Pressure Value Exponent
Set the exponent of the exponential value of the R2
setpoint (format X.XE-XX) when it is used for pressure
monitoring (Parameter Buffer, Offset 20, B
3-5
= 4).
176
B
0
= Stop Speed Reading
This function measures the pump speed after a stop
command.
0 = Off
1 = On
167
B
1
= Active Stop
This function brakes the pump after a stop command, by
using the motor as a generator.
0 = Off
1 = On
107
B
2
- Reserved
19
1
B
3-4
= Start/Stop/Interlock Mode
Change the logic of Start/Stop and Interlock inputs.
Ask to Varian personnel for this option
151
B
0
= Vent & Purge Auto/Man
0 = Auto (the controller drives purge and vent valves
automatically)
1 = Manual (the user can command the valves by serial
line or profibus)
125
B
1
= Gas Load Type
Select here the gas load
0 = Ar
1 = N
2
157
B
2
– Interlock Type
0 = continuos (the interlock must be always present to
run the pump)
1 = at start (the interlock must be present only at start
command)
110
B
3
= Setpoint R1 Logic
0 = active close (NO)
1 = active open (NC)
104
B
4
= Setpoint R2 Logic
0 = active close (NO)
1 = active open (NC)
174
B
5-6
= Pressure Unit
0 = mbar
1 = Pascal
2 = Torr
163
20
1
B
7
= Reserved