![background image](http://html1.mh-extra.com/html/varian/969-8988/969-8988_instruction-manual_854644026.webp)
TECHNICAL INFORMATION
84 87-900-986-01 (
C
)
N.
Read/
Write
Data
Type
Description
Admitted
Values
110
R/W
L
Interlock type
(default = 1)
Impulse = 0
Continuous = 1
111
R/W
L
Analog
output type:
output
voltage
signal
proportional
to frequency
or power
0 = frequency
1 = power
(default = 1)
2 = Pump
temperature
3 = Pressure
117
R/W
N
Low Speed
frequency
(Hz)
1100 to
“Maximum
rotational
frequency”
(win 121)
(default = 1100)
120
R/W
N
Rotational
frequency
setting (Hz)
1100 to
“Maximum
rotational
frequency”
(win 121)
(default = 1350)
122
R/W
L
Set vent
valve on/off
(on = closed)
On = 1
Off = 0
(default = 1)
123
124
Reserved to Varian service
125
R/W
L
Set the vent
valve
operation
Automatic = 0
(see note 1.)
On command = 1
(see note 2.)
126
R/W
N
Vent valve
opening
delay
(expressed in
0.2 sec)
0 to 65535
(corresponding to
0 to 13107 sec)
130
Reserved to Varian service
147
R/W
N
Vent open
time
See “vent
connector”
paragraph
0 = infinite
1 bit = 0.2 sec
155
R
N
Power limit
applied
Read the
maximun
allowable
power
watt
157
R/W
N
Gas load
type
Select the
gas load to
the pump
Ø = N
2
1 = Av
161
R/W
N
Pressure
Reading
Connection
Factor
See “GAUGE
CONNECTOR
” for more
details
0 to 10
0 = 0
10 = 1 = N
2
162
R/W
A
R1 Set Point
Pressure
N.
Read/
Write
Data
Type
Description
Admitted
Values
Valve
Valid if min.
101 = 4
Format X.X
E. XX
Where X = 0
to 9
s = + or -
163
R/W
N
Pressure unit
of measure
0 = mBar
1 = Pa
2 = Torr
167
R/W
A
Stop speed
reading
Activates /
deactivates
the pump
speed
reading after
Stop
command
0 = disable
1 = enable
171
R/W
N
R2 Set Point
Type
0 = Freq
1 = Power
2 = Time
3 = Normal
4 = Pressure
172
R/W
N
R2 Set Point
Value
(Hz, W, s)
173
R/W
N
R2 Set Point
Mask (sec)
174
R/W
L
R2 Set Point
Segnal
Activation
Type
Ø = high level
active
1 = low level
active
175
R/W
N
R2 Set front
Mysteresis
(in % of R2
Valve)
176
R
A
R2 Set Point
Pressure
Valve
Valid in win
171 = 4
Format X.X E
X.X
Where: X= 0
to 9
s = + or -
200
R
N
Pump
current in
mA dc
201
R
N
Pump
voltage in
Vdc
202
R
N
Pump power
in W (pump
current x
pump
voltage duty
cycle)
203
R
N
Driving
frequency
in Hz