22
4. Maintenance and Inspection Points
Location (device)
Description
Timing
Glass bell jar
Clean the inside.
As necessary
Oil sealed rotary
vacuum pump
Confirm that the oil level of the oil level gauge
is within the indicated lines.
Every time
before using
Replace oil.
If the pressure during isolated operation is 5
Pa or more.
As necessary
Oil diffusion
pump
Replace oil.
If the ultimate pressure and the exhaust time is
changed after an incorrect air intake.
If the ultimate pressure and the exhaust time is
changed after long years of continuous use.
As necessary
Cooling water is flowing.
Every time
before using
Main valve
Clean the sealing surface.
6 months to 1
year
When foreign
material is
dropped on the
surface.
Vacuum gauge
Replace the gauge head.
As necessary
Wiring cable
Confirm that there is no looseness in wiring
terminals and screws.
As necessary
Oil mist trap
Replace the element.
6 months to 1
year
