(4) Operations -------------------------------------------------------------------------------- 13
1. Potential dangers and safety precautions during operation --------- 13
2. Evacuation device operation ------------------------------------------------- 14
2-1 Preparation ------------------------------------------------------------------ 14
2-2 Operations ------------------------------------------------------------------- 14
2-3 Shut down ------------------------------------------------------------------ 14
3. Vapor deposition operation --------------------------------------------------- 15
3-1 Opening the vacuum chamber ------------------------------------------ 15
3-2 Vacuum chamber evacuation ------------------------------------------- 15
4. Creating a film ------------------------------------------------------------------- 16
4-1 Preparation ------------------------------------------------------------------ 16
4-2 Creating a film ------------------------------------------------------------- 16
5. Handling malfunctions --------------------------------------------------------- 17
5-1 Instantaneous power outage -------------------------------------------- 17
5-2 Long power outage -------------------------------------------------------- 17
5-3 Operation after power recovery ----------------------------------------- 17
5-4
Instantaneous water outage---------------------------------------------- 17
5-5
Long water outage---------------------------------------------------------- 17
5-6
Operation after water recovery------------------------------------------ 17
(5) Maintenance and repair --------------------------------------------------------------- 18
1. Risks and Safety Measure upon Maintenance and Repair ----------- 18
2. Maintenance and Repair that Can be Made by User ------------------ 19
3. Removal, Maintenance, and Installation of Devices -------------------- 19
3-1 Oil sealed rotary vacuum pump ----------------------------------------- 19
3-2 Oil diffusion pump ---------------------------------------------------------- 20
3-3 Oil mist trap ------------------------------------------------------------------ 21
3-4 Glass bell jar O-ring ------------------------------------------------------- 21
3-5 Glass bell jar ----------------------------------------------------------------- 21
4. Maintenance and Inspection Points ---------------------------------------- 22
5. Troubleshooting ----------------------------------------------------------------- 23
6. Storage of Equipment ---------------------------------------------------------- 24
7. Consumable List ---------------------------------------------------------------- 24
(6) Disposal ----------------------------------------------------------------------------------- 26
1. Cautions upon Disposal ------------------------------------------------------- 26
(7) Optional Parts ---------------------------------------------------------------------------- 26
1. Standard Optional Parts List ------------------------------------------------- 26