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3. Removal, Maintenance, and Installation of Devices
3-2 Oil diffusion pump
1) Required tools
Phillips head (+) screwdriver, 17 mm spanner x 2
2) Removal procedure
- All devices of the coater stop.: Confirm
- The breaker of the devices is turned off. Confirm
- The primary power supply of the coater is removed.: Confirm
- Remove the side panel and rear panel (optional) if they are attached.
- BACK.P VENT(or R.P VENT) is open.: Confirm
- Three-way valve: FORE (Leave the inside of the DP open air)
- Discharge the cooling water from the cooling water piping of the oil
diffusion pump.
- Remove the heater wiring.
- Remove the piping of the oil diffusion pump. (2 locations for inlet and
outlet)
- Remove the clamp of the exhaust opening, and then the flexible tube
and O-ring of the center ring.
- Remove the tightening bolt from the suction opening flange.
(Remove it while supporting the oil diffusion pump.)
- Draw the oil diffusion pump forward and take it out.
3) Oil heater replacement
Refer to the separate sheet – OFK-3US Oil Diffusion Pump User’s
Manual
4) Order of attachment
- Check that there is no dirt on the suction opening of the oil diffusion
pump.
- Position the oil diffusion pump with its pump suction opening faced to
the front of the roughing piping and below the liquid nitrogen trap.
- Lift the oil diffusion pump, tighten the M10 bolts (2 locations) by three
or four ridges, and then tighten other two locations left.
- Tighten the fixing bolts evenly (orthogonally).
- Attach the O-ring for the center ring and the flexible tube to the
exhaust opening. Fix it with clamp.
- Attach the cooling water piping to the oil diffusion pump (2 locations
for inlet and outlet.)
- Attach the heater wiring.
- Attach the side panel and rear panel (optional).
