Ulvac VD30C, Инструкция по эксплуатации

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YK15-0009-DI-002-04
iv
DANGER
Pump oil as well as the Pump unit becomes toxic should the toxic gas
was sucked in the vacuum pump. Pay attention to execute maintenance
work.
WARNING
We would be obliged to refrain from handling and/or executing
maintenance of this product if the detail of used hazardous substance
was not disclosed or this product has exhausted such substance that the
detoxification process is hardly conducted.
WARNING
This Instruction Manual shall absolutely need to be delivered to the last
user that uses this product.
WARNING
You are kindly requested to acknowledge that specifications and/or price
of this product and description of the Instruction Manual are subject to
change without prior notice for improvement.
Any change shall update the version number at the top right of the
Instruction Manual cover and issue the revised version.
If you need the latest manual, please feel free to contact our Components
Division.
WARNING
To export this product abroad, you have to clear the examination in
accordance with the Foreign Exchange law, Foreign Trade law and
relevant decree, ordinance and order.
Please feel free to contact our sales office or agency closest to you or
our Components Division.