Ulvac VD30C, Инструкция по эксплуатации

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YK15-0009-DI-002-04
40
5.5 Trouble shooting
Table. 7 Troubleshooting
Trouble Causes Processing Method Reference
The Pump
dose not
run.
1 Motor connection is wrong. Check the connection. 3.5
2
Safety circuit such as a
MS (Magnetic Switch) is
not correctly set.
Make the Safety circuit conform
to the Motor specification.
3.5
3 Oil viscosity got higher. Change oil.
3.2
5.2.1
5.2.2
4
Foreign substance
entered in the Pump
caused burning
the rotor or the like
Conduct the overhaul
(replacement of the cylinder,
rotor, cover and so on.)
5.4
5
Reactive agent
accumulated inside the
Pump while the Pump was
stopped after having
exhausted the reactive
gas. Conduct the overhaul
(Cleaning inside the Pump,
removal of reactive agent and so
on.)
5.4
6
The Pump is not
connected to the power
supply.
Connect the Pump to the power
supply.
3.5
7
The power switch is not
turned on.
Turn on the power switch. 3.5
8
Are all three phases of
power supply normal?
Abnormal phase voltage.
Check the power supply. 3.5
9
Are the Safety circuit such
as a MS (Magnetic Switch)
and MCCB (Molded Case
Circuit Breaker) normal?
Trips.
Right the cause of trips.
Reset
3.5